Granted Patent B2

US 9,823,074 · App. 14/416,727 · Granted Nov 21, 2017

Inventors: Hugues Beaulaton (Toulouse, FR); Laurent Cornibert (Toulouse, FR); Gerhard Trauth (Muret, FR)

Assignee: NXP USA, Inc.

G01C19/5712G01C19/5776H03B28/00H03B2200/0082

Abstract

Claims (28)

1. A drive-mode oscillator module for use within a micro-electro-mechanical system (MEMS) device; the drive-mode oscillator module being arranged to receive a proof-mass measurement signal from a proof-mass of the MEMS device and to output a proof-mass actuation signal to the proof-mass of the MEMS device; wherein the drive-mode oscillator module comprises:

a first, higher gain accuracy drive-mode component for receiving an analogue voltage measurement signal from a capacitance to voltage module, wherein the analogue voltage measurement signal is used in generating an actuation signal during an active mode of the MEMS device, wherein the actuation signal is output by the drive-mode oscillator module during the active mode of the MEMS device; and

a second, lower power consumption drive-mode component for receiving a digital clock signal used in generating an actuation signal during a standby mode of the MEMS device, wherein the digital clock signal has a higher frequency than a natural oscillating frequency of the proof-mass, and the actuation signal is output by the drive-mode oscillator module during the standby mode of the MEMS device, wherein the second drive-mode component comprises:

at least one comparator component arranged to receive the analogue voltage measurement signal for the proof-mass of the MEMS device, and to output an equivalent square wave signal;

at least one digital phase shifter component arranged to receive the square wave signal output by the comparator component and the digital clock signal, and to output a phase shifted signal; and

at least one digital buffer component arranged to receive the phase shifted signal and to output an actuation signal corresponding to the received phase shifted signal.

2. The drive-mode oscillator module of claim 1 , wherein the second drive-mode component comprises a digital oscillator circuit.

3. The drive-mode oscillator module of claim 1 , wherein the at least one digital buffer component is arranged to output an actuation signal comprising a fixed amplitude.

4. The drive-mode oscillator module of claim 3 , wherein the at least one digital buffer component is arranged to output an actuation signal comprising a configurable fixed amplitude.

5. The drive-mode oscillator module of claim 1 , wherein the first drive-mode component comprises an analogue oscillator circuit.

6. The drive-mode oscillator module of claim 5 , wherein the first drive-mode component comprises an integration component arranged to receive the analogue voltage measurement signal for the proof-mass of the MEMS device, and to output a phase shifted signal.

7. The drive-mode oscillator module of claim 6 , wherein the first drive-mode component comprises a voltage gain amplifier (VGA) component arranged to receive the phase shifted signal and to output an actuation voltage signal corresponding to the received phase shifted signal.

8. The drive-mode oscillator module of claim 7 , wherein the first drive-mode component comprises an automatic gain control (AGC) component arranged to provide a control signal to the VGA component to control an amplitude of the actuation voltage signal output thereby.

9. The drive-mode oscillator module of claim 1 , wherein the capacitance to voltage, component is arranged to receive the proof-mass measurement signal comprising an indication of a capacitance change of a MEMS drive measurement unit, DMU, and to convert the received indication of a capacitance change to the analogue voltage measurement signal.

10. The drive-mode oscillator module of claim 1 , wherein the drive-mode oscillator module comprises a selector component arranged to selectively output as the proof-mass actuation signal one of the actuation signals output by the first and second drive-mode components in accordance with a control signal.

11. The drive-mode oscillator module of claim 1 implemented within an integrated circuit device comprising at least one die within a single integrated circuit package.

12. A micro-electro-mechanical system (MEMS) device comprising at least one drive-mode oscillator module according to claim 1 .

13. A method of generating an actuation signal for a proof-mass within a micro-electro-mechanical system (MEMS) device, the method comprising:

configuring a first, higher gain accuracy drive-mode component to generate the actuation signal for the proof-mass during an active mode of the MEMS device, wherein the actuation signal is determined using an analogue voltage measurement signal during the active mode; and

powering down the first, higher gain accuracy drive-mode component and configuring a second, lower power consumption drive-mode component to generate the actuation signal for the proof-mass during a standby mode of the MEMS device, wherein the actuation signal is determined using a digital clock signal having a higher frequency than a natural oscillating frequency of the proof-mass during the standby mode.

14. The method of claim 13 further comprising:

receiving the analogue voltage measurement signal for the proof-mass of the MEMS device and the digital clock signal in a comparator component in the lower power consumption drive-mode component.

15. The method of claim 14 further comprising:

outputting an equivalent square wave signal from the comparator to a digital phase shifter component in the lower power consumption drive-mode component.

16. The method of claim 15 further comprising:

outputting a phase shifted signal from the digital phase shifter component to a digital buffer component.

17. The method of claim 16 further comprising:

outputting an actuation signal corresponding to the received phase shifted signal from the digital buffer component.

Assignments (25)

Continuity (1)