Acoustic transducer
An acoustic transducer has a substrate having a cavity that is open at a top of the substrate, a vibration electrode film provided above the substrate so as to cover the cavity, and a fixed electrode film provided a distance above the vibration electrode film. A gap is formed between an upper surface of the substrate and a lower surface of the vibration electrode film around the cavity. In the gap across which the upper surface of the substrate and the lower surface of the vibration electrode film face each other, a narrow portion of the gap that is narrower than another portion of the gap is disposed. The narrow portion of the gap extends linearly.
1. An acoustic transducer comprising:
a substrate having a cavity that is open at a top of the substrate;
a vibration electrode film provided above the substrate so as to cover the cavity; and
a fixed electrode film provided at a distance above the vibration electrode film,
wherein a gap is formed between an upper surface of the substrate and a lower surface of the vibration electrode film around the cavity,
wherein, in the gap across which the upper surface of the substrate and the lower surface of the vibration electrode film face each other, a narrow portion of the gap that is narrower than another portion of the gap is disposed,
wherein the narrower portion of the gap extends linearly, and
wherein the vibration electrode film comprises a linearly sloped portion that makes an acute angle with the upper surface of the substrate.
2. The acoustic transducer according to claim 1 , wherein the narrow portion of the gap extends in a direction other than a direction orthogonal to an end edge of the vibration electrode film.
3. The acoustic transducer according to claim 2 , wherein the narrow portion of the gap extends in a direction parallel to the end edge of the vibration electrode film.
4. The acoustic transducer according to claim 1 , wherein a size of the gap at an end edge of the vibration electrode film is smaller than a size of the gap at an edge of the top opening of the cavity.
5. The acoustic transducer according to claim 4 , wherein a portion of the vibration electrode film facing the upper surface of the substrate is curved in cross section such that the end edge of the vibration electrode film comes closer to the upper surface of the substrate.
6. The acoustic transducer according to claim 4 , wherein a portion of the vibration electrode film facing the upper surface of the substrate is bent in cross section such that the end edge of the vibration electrode film comes closer to the upper surface of the substrate.
7. The acoustic transducer according to claim 1 , wherein a size of the gap at an intermediate position between an edge of the top opening of the cavity and an end edge of the vibration electrode film is smaller than a size of the gap at the edge of the top opening of the cavity and a size of the gap at the end edge of the vibration electrode film.
8. The acoustic transducer according to claim 1 , further comprising:
a stopper projected from a lower surface of a portion of the vibration electrode film facing the upper surface of the substrate,
wherein the projection length of the stopper is greater than a height difference between a proximal end of the stopper and a lowermost end of the vibration electrode film.
9. The acoustic transducer according to claim 1 , further comprising:
a projecting portion provided on the upper surface of the substrate in a region of the upper surface of the substrate facing the vibration electrode film,
wherein the projecting portion reduces a size of the gap formed between the upper surface of the substrate and the lower surface of the vibration electrode film.