Pulse width controller
A pulse width controller for a thermal processing system is disclosed. Pulsed electromagnetic radiation is directed through a rotatable wave plate to a polarizing beam splitter, which reflects and transmits according to the phase angle of the wave plate. Radiation transmitted by the polarizing beam splitter is directed into an optical circuit that returns the radiation to the polarizing beam splitter after a transit time. A second rotatable wave plate is positioned in the optical circuit. The polarizing beam splitter reflects and transmits the returned radiation according to the phase angle of the second rotatable wave plate. A second pulse width controller may be nested in the optical circuit, and any number of pulse width controllers may be nested.
1. An optical apparatus, comprising:
a first rotatable wave plate having an optical axis;
a selective reflector positioned along the optical axis to propagate a first electromagnetic radiation along the optical axis;
a first reflector positioned along the optical axis to receive the first electromagnetic radiation and to propagate a first deflected electromagnetic radiation along a first deflection axis;
a second reflector positioned to receive the first deflected electromagnetic radiation from the first reflector and to propagate a second deflected electromagnetic radiation to the selective reflector;
a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is perpendicular to the optical axis of the first rotatable wave plate, and wherein the second deflected electromagnetic radiation is propagated along the transmitting axis;
a second rotatable wave plate positioned along the transmitting axis;
a first actuator coupled to the first rotatable wave plate;
a second actuator coupled to the second rotatable wave plate; and
a controller coupled to the first actuator and second actuator.
2. The optical apparatus of claim 1 , further comprising a third actuator coupled to the first reflector and a fourth actuator coupled to the second reflector.
3. A system for processing a substrate comprising:
a source of electromagnetic energy;
an optical system for focusing the electromagnetic energy; and
a pulse width controller optically coupled to the source of electromagnetic energy and the optical system, the pulse width controller comprising:
a first rotatable wave plate having an optical axis;
a selective reflector positioned along the optical axis to propagate a first electromagnetic radiation along the optical axis;
a first reflector positioned along the optical axis to receive the first electromagnetic radiation and to propagate a first deflected electromagnetic radiation along a first deflection axis;
a second reflector positioned to receive the first deflected electromagnetic radiation from the first reflector and to propagate a second deflected electromagnetic radiation to the selective reflector;
a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is perpendicular to the optical axis of the first rotatable wave plate, and wherein the second deflected electromagnetic radiation is propagated along the transmitting axis;
a second rotatable wave plate positioned along the transmitting axis;
a first actuator coupled to the first rotatable wave plate;
a second actuator coupled to the second rotatable wave plate; and
a controller coupled to the first actuator and second actuator.
4. The system of claim 3 , wherein the second wave plate is disposed in an optical circuit.
5. The system of claim 4 , wherein the source of electromagnetic energy comprises two or more lasers.
6. The system of claim 3 , wherein the selective reflector is positioned between the first rotatable wave plate and the first reflector.
7. A system for processing a substrate, comprising:
a first rotatable wave plate having an optical axis; and
an optical circuit comprising:
a selective reflector positioned along the optical axis to propagate a first electromagnetic radiation along the optical axis;
a first reflector positioned along the optical axis to receive the first electromagnetic radiation and to propagate a first deflected electromagnetic radiation along a first deflection axis;
a second reflector positioned to receive the first deflected electromagnetic radiation from the first reflector and to propagate a second deflected electromagnetic radiation to the selective reflector;
a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is perpendicular to the optical axis of the first rotatable wave plate, and wherein the second deflected electromagnetic radiation is propagated along the transmitting axis;
a second rotatable wave plate positioned along the transmitting axis;
a first actuator coupled to the first rotatable wave plate;
a second actuator coupled to the second rotatable wave plate; and
a controller coupled to the first actuator and second actuator.
8. The system of claim 7 , wherein the selective reflector is positioned to transmit electromagnetic radiation from the first rotatable wave plate.
9. The system of claim 7 , wherein the second reflector is positioned to receive electromagnetic radiation reflected by the first reflector and reflect electromagnetic radiation to the second rotatable wave plate.
10. The system of claim 9 , wherein the second rotatable wave plate is positioned to transmit electromagnetic radiation to the polarizing beam splitter.