Planar motor system with increased efficiency
View Patent ↗A planar motor system comprises a platen with a first planar motor component and a stage with a second planar motor component. The stage can move along a first cardinal axis or a second cardinal axis. The planar motor system further comprises a drive system. When the drive system is energized in a first drive configuration, it applies a first force and a second force. The first force and the second force are not parallel to any cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis. When the drive system is energized in a second drive configuration, it applies a third force and a fourth force. The third force and the fourth force are not parallel to any cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis.
1. A planar motor system comprising:
a platen comprising:
a planar surface; and
a first planar motor component;
a stage comprising a second planar motor component, wherein the stage, when driven, moves parallel to the planar surface of the platen along a first cardinal axis or along a second cardinal axis; and
a drive system, wherein the drive system, when energized in a drive configuration, applies to the stage a first force and a second force, wherein:
the first force has a first force magnitude and a first force direction;
the first force direction is not parallel to the first cardinal axis;
the first force direction is not parallel to the second cardinal axis;
the second force has a second force magnitude and a second force direction;
the second force direction is not parallel to the first cardinal axis;
the second force direction is not parallel to the second cardinal axis; and
a vector sum of the first force and the second force is parallel to the first cardinal axis.
2. The planar motor system of claim 1 , wherein the drive configuration is a first drive configuration, and wherein the drive system, when energized in a second drive configuration, applies to the stage a third force and a fourth force, wherein:
the third force has a third force magnitude and a third force direction;
the third force direction is not parallel to the first cardinal axis;
the third force direction is not parallel to the second cardinal axis;
the fourth force has a fourth force magnitude and a fourth force direction;
the fourth force direction is not parallel to the first cardinal axis;
the fourth force direction is not parallel to the second cardinal axis; and
a vector sum of the third force and the fourth force is parallel to the second cardinal axis.
3. The planar motor system of claim 2 , wherein:
the drive system comprises a controller;
the drive system is energized in the first drive configuration in response to a first command from the controller; and
the drive system is energized in the second drive configuration in response to a second command from the controller.
4. The planar motor system of claim 2 , wherein a magnitude of the vector sum of the first force and the second force is equal to a magnitude of the vector sum of the third force and the fourth force.
5. The planar motor system of claim 2 , wherein a magnitude of the vector sum of the first force and the second force is greater than a magnitude of the vector sum of the third force and the fourth force.
6. The planar motor system of claim 1 , wherein the first cardinal axis and the second cardinal axis are orthogonal.
7. The planar motor system of claim 1 , wherein:
the platen comprises an array of ferromagnetic teeth aligned along a first array axis and a second array axis, wherein:
the first array axis is not parallel to the first cardinal axis;
the first array axis is not parallel to the second cardinal axis;
the second array axis is not parallel to the first cardinal axis; and
the second array axis is not parallel to the second cardinal axis; and
the stage comprises a plurality of drive units, wherein each drive unit in the plurality of drive units, when energized, electromagnetically couples to the array of ferromagnetic teeth and applies a force to the stage along the first array axis or along the second array axis.
8. The planar motor system of claim 1 , wherein the planar motor system is part of a lithographic projection system, and the stage is configured to carry a substrate.
9. A planar motor system comprising:
a platen having a planar surface, wherein:
the platen comprises a plurality of planar regions; and
each specific planar region in the plurality of planar regions comprises a specific array of ferromagnetic ridges aligned along a specific regional array axis;
a stage which, when driven, moves parallel to the planar surface of the platen along a first cardinal axis or along a second cardinal axis, wherein each specific regional array axis is not parallel to the first cardinal axis and is not parallel to the second cardinal axis, and wherein:
the stage comprises a plurality of drive units;
each specific drive unit in the plurality of drive units corresponds to a specific planar region in the plurality of planar regions; and
each specific drive unit, when energized, applies a specific force to the stage, wherein the specific force has a specific force magnitude and a specific force direction orthogonal to the specific regional array axis in the corresponding specific planar region; and
a controller, wherein, in response to a first command from the controller, at least two specific drive units are energized such that a first force and a second force are applied to the stage, wherein:
the first force has a first force magnitude and a first force direction;
the first force direction is not parallel to the first cardinal axis;
the first force direction is not parallel to the second cardinal axis;
the second force has a second force magnitude and a second force direction;
the second force direction is not parallel to the first cardinal axis;
the second force direction is not parallel to the second cardinal axis; and
a vector sum of the first force and the second force is parallel to the first cardinal axis.
10. The planar motor system of claim 9 , wherein, in response to a second command from the controller, at least two specific drive units are energized such that a third force and a fourth force are applied to the stage, wherein:
the third force has a third force magnitude and a third force direction;
the third force direction is not parallel to the first cardinal axis;
the third force direction is not parallel to the second cardinal axis;
the fourth force has a fourth force magnitude and a fourth force direction;
the fourth force direction is not parallel to the first cardinal axis;
the fourth force direction is not parallel to the second cardinal axis; and
a vector sum of the third force and the fourth force is parallel to the second cardinal axis.
11. The planar motor system of claim 10 , wherein a magnitude of the vector sum of the first force and the second force is equal to a magnitude of the vector sum of the third force and the fourth force.
12. The planar motor system of claim 10 , wherein a magnitude of the vector sum of the first force and the second force is greater than a magnitude of the vector sum of the third force and the fourth force.