Coating composition for preventing collapse of capacitor
Disclosed herein is a coating composition for preventing the collapse of a capacitor, comprising a silane compound or a phosphorus compound. The coating composition can adjust a contact angle with regard to water on a substrate, thereby preventing the collapse of capacitor patterns on the substrate.
1. A coating composition for preventing the collapse of a capacitor,
the coating composition comprising
a capacitor coating material in an amount of 1 to 50% by weight, and
an organic solvent in an amount of 50 to 99% by weight,
wherein the capacitor coating material contains (i) a phosphorus compound selected from the group consisting of hexadecylphosphonic acid, lauryl phosphate, and a combination thereof, or (ii) a phosphorus compound selected from the group consisting of hexadecylphosphonic acid, lauryl phosphate, and a combination thereof and a silane compound of the following Chemical Formula 1:
wherein R 1 , R 2 , R 3 , and R 4 are each independently a hydrophilic group identified as an alkoxy group of C1-C4, or a hydrophobic group identified as an aromatic alkyl group of C2-C18, with a proviso that at least one of R 1 , R 2 , R 3 , and R 4 is an alkoxy of C1-C4, and that at least one of R 1 , R 2 , R 3 , and R 4 is an aromatic alkyl group of C7-C18;
wherein the organic solvent is selected from the group consisting of a glycol, alkylene glycol ether of C4-C20, alkylene glycol alkyl ether of C4-C20, an alcohol of C1-C10, a hydrocarbon of C6-C10, and a combination thereof; and
wherein a capacitor coated with the coating composition for preventing the collapse has a contact angle of 105-122° with regard to water.
2. A capacitor, coated with the coating composition of claim 1 .
3. The capacitor of claim 2 , having a contact angle of 105-122° with regard to water.