Methods for fabricating integrated circuits having device contacts
View Patent ↗Methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes providing a semiconductor device with a metal silicide electrically coupled thereto. A contact opening exposing the metal silicide is formed to the semiconductor device. A conductive material is deposite within the contact opening to form a contact to the metal silicide while simultaneously forming a contact seam void within the contact. A self-aligned conductive material is deposited within the contact to form a conductive plug that at least partially fills the contact seam void, and a metallization layer is deposited overlying the contact.
1. A method for fabricating an integrated circuit, the method comprising:
providing a semiconductor device with a metal silicide electrically coupled thereto;
forming a contact opening to the semiconductor device and exposing the metal silicide;
depositing a conductive material within the contact opening to form a contact to the metal silicide while simultaneously forming a contact seam void within the contact;
depositing a self-aligned conductive material within the contact to form a conductive plug that at least partially fills the contact seam void; and
depositing a metallization layer overlying the contact.
2. The method of claim 1 , wherein the self-aligned conductive material comprises a tungsten-based, nickel-based, or silver-based self-aligned conductive material.
3. The method of claim 1 , wherein the self-aligned conductive material comprises tungsten cobalt phosphide (WCoP), tungsten cobalt boride (WCoB), tungsten nitride (WN), nickel tungsten phosphide (NiWP), nickel phosphide (NiP), nickel titanium (NiTi), or silver (Ag)-based nanoclusters.
4. The method of claim 1 , wherein the contact comprises tungsten.
5. The method of claim 1 , wherein forming the conductive plug comprises filling about 50 to about 100% of the contact seam void with the conductive plug.
6. The method of claim 1 , wherein forming the conductive plug comprises filling about 100% of the contact seam void with the conductive plug.
7. The method of claim 1 , wherein forming the conductive plug comprising the self-aligned conductive material comprises depositing the self-aligned conductive material in at least a portion of the contact seam void by electroless plating of the self-aligned conductive material from solution.
8. The method of claim 1 , further comprising forming a liner overlying the contact, wherein depositing the metallization layer comprises depositing the metallization layer overlying the liner.
9. The method of claim 1 , wherein depositing the metallization layer comprises depositing copper using an electrochemical plating process to form the metallization layer.