Method for manufacturing magnetic recording medium, magnetic recording medium and magnetic recording and reproducing apparatus
View Patent ↗A method for manufacturing a magnetic recording medium is provided. An orientation control layer is deposited on a non-magnetic substrate to control an orientation of a layer located directly thereon, and a perpendicular magnetic layer whose easy axis of magnetization is mainly oriented perpendicular to the non-magnetic substrate is deposited thereon. In depositing the orientation control layer, a first granular structure layer containing Ru or a material mainly made of Ru and a first oxide having a melting point of 1000 degrees C. or lower are deposited by sputtering. In depositing the perpendicular magnetic layer, a second granular structure layer containing magnetic particles and a second oxide having a melting point of 1000 degrees C. or lower are deposited by sputtering, and the magnetic particles are grown so as to form a columnar crystal continuing in a thickness direction. The columnar crystal includes crystal grains constituting the orientation control layer.
1. A method for manufacturing a magnetic recording medium, comprising steps of:
depositing an orientation control layer on a non-magnetic substrate to control an orientation of a layer located directly thereon; and
depositing a perpendicular magnetic layer whose easy axis of magnetization is mainly oriented perpendicular to the non-magnetic substrate on the orientation control layer,
wherein the step of depositing the orientation control layer includes a step of depositing a first granular structure layer containing Ru or a material mainly made of Ru, and a first oxide having a melting point of 1000 degrees C. or lower by a sputtering method, the first oxide being at least one selected from of the group consisting of In 2 O 3 , TeO 2 , Sb 2 O 3 and B 2 O 3 , and
wherein the step of depositing the perpendicular magnetic layer includes a step of depositing a second granular structure layer containing magnetic particles and a second oxide having a melting point of 1000 degrees C. or lower by a sputtering method, and the magnetic particles are grown so as to form a columnar crystal continuing in a thickness direction, the columnar crystal including crystal grains constituting the orientation control layer, the second oxide being at least one selected from of the group consisting of In 2 O 3 , TeO 2 and Sb 2 O 3 .
2. The method as claimed in claim 1 , wherein the perpendicular magnetic layer includes a plurality of the second granular structure layers, and each of the plurality of the second granular structure layers includes the magnetic particles and the second oxide having the melting point of 1000 degrees C. or lower.
3. The method as claimed in claim 1 , wherein the perpendicular magnetic layer includes a plurality of the second granular structure layers in the thickness direction.
4. The method as claimed in claim 1 , wherein the first granular layer containing Ru or a material mainly made of Ru, and the first oxide having the melting point of 1000 degrees C. or lower, is deposited at a sputtering gas pressure of 5 Pa or lower.
5. The method as claimed in claim 1 , wherein the second granular structure layer containing the magnetic particles and the oxide having the melting point of 1000 degrees C. or lower is deposited at a sputtering pressure of 3 Pa or lower.