Data processing method, data processing apparatus and processing apparatus

1. A data processing apparatus comprising:

a processing chamber in which a sample is subjected to an etching process;

a measuring device which is configured to obtain data relating to the processing chamber;

a first storage which is configured to store the data received by the input/output device;

a second storage which is configured to store a data processing program that includes the steps of:

calculating, using a double exponential smoothing method in which the data is set as an input value, a first predicted value that is a predicted value of smoothed data and a second predicted value that is a predicted value of a gradient of the smoothed data, as an output value; and

calculating, using a double exponential smoothing method in which the second predicted value calculated as the output value is set as input data, a third predicted value that is a predicted value of smoothed data and a fourth predicted value that is a predicted value of a gradient of the smoothed data, as an output value; and

a calculation processing apparatus which is configured to perform the data processing under the data processing program; and

a controller which is configured to detect a state of the processing chamber or a change in the state of the processing chamber on the basis of the first predicted value calculated by the calculation processing apparatus as a result of a data smoothing process, the second predicted value calculated by the calculation processing apparatus or the third predicted value calculated by the calculation processing apparatus as a result of a first differential process, and the fourth predicted value calculated by the calculation processing apparatus as a result of a second differential process, respectively, wherein

the controller is further configured to detect an end point of the etching process based on the detected state or change in state of the processing chamber and to control the processing chamber in accordance with the detected end point.

2. A processing apparatus comprising:

a processing chamber to be a control object and configured to perform an etching process;

a measuring device which is configured to obtain data relating to the processing chamber;

a calculation processing apparatus which is configured to perform data processing under a data processing program that includes the steps of:

calculating, using a double exponential smoothing method in which the data relating to the processing chamber is set as an input value, a first predicted value that is a predicted value of smoothed data and a second predicted value that is a predicted value of a gradient of the smoothed data, as an output value; and

calculating, using a double exponential smoothing method in which the second predicted value calculated as an output value is set as input data, a third predicted value that is a predicted value of smoothed data and a fourth predicted value that is a predicted value of a gradient of the smoothed data, as an output value; and

a controller which is configured to detect a state of the processing chamber or a change in the state of the processing chamber on the basis of at least one of the first predicted value calculated by the calculation processing apparatus, the second predicted value calculated by the calculation processing apparatus, the third predicted value calculated by the calculation processing apparatus, and the fourth predicted value calculated by the calculation processing apparatus, wherein

the controller is further configured to detect an end point of the plasma etching process based on the detected state or change in state of the processing chamber and to control the processing chamber in accordance with the detected end point.

3. The processing apparatus according to claim 2 , wherein the processing chamber is a processing chamber in which a sample mounted on a sample stage is subject to a plasma etching process.

4. A processing apparatus comprising:

a processing chamber to be a control object and configured to perform an etching process;

a measuring device which is configured to obtain data relating to the processing chamber;

a calculation processing apparatus which is configured to perform a processing of the data under a data processing program that uses a responsive double exponential smoothing method to generate a result of a data smoothing process that is a first predicted value of smoothed data, a result of a first differential process that is a second predicted value of a gradient of the smoothed data or a third predicted value of smoothed data, and a result of a second differential process that is a fourth predicted value of a gradient of the smoothed data,

in which smoothing parameters are varied based on an error between the data obtained by the measuring device and a predicted value of smoothed data, and that processes the data while making a lower limit value of a variable range of the smoothing parameters greater than zero; and

a controller which is configured to detect a plasma processing state of the sample or a change in the plasma processing state of the sample on the basis of at least one of the result of the data smoothing process calculated by the processing of the data, the result of the first differential process calculated by the processing of the data, or the result of the second differential process calculated by the processing of the data, wherein

the controller is further configured to detect an end point of the plasma etching process based on the detected plasma processing state or change in plasma processing state of the sample and to control the plasma etching process in accordance with the detected end point.

5. A processing apparatus comprising:

a processing chamber in which a sample mounted on a sample stage is subjected to a plasma etching process;

a measuring device which is configured to obtain light emission data in the plasma etching process of the sample;

a calculation processing apparatus which is configured to perform a processing of the data under a data processing program that uses a responsive double exponential smoothing method to generate a result of a data smoothing process that is a first predicted value of smoothed data, a result of a first differential process that is a second predicted value of a gradient of the smoothed data or a third predicted value of smoothed data, and a result of a second differential process that is a fourth predicted value of a gradient of the smoothed data,

in which smoothing parameters are varied based on an error between the data obtained by the measuring device and a predicted value of smoothed data, and that processes the data while making a lower limit value of the variable range of the smoothing parameters greater than zero; and

a controller which is configured to detect a plasma processing state of the sample or a change in the plasma processing state of the sample on the basis of at least one of the result of the data smoothing process calculated by the processing of the data, the result of the first differential process calculated by the processing of the data, or the result of the second differential process calculated by the processing of the data, wherein

the controller is further configured to detect an end point of the plasma etching process based on the detected plasma processing state or change in plasma processing state of the sample and to control the plasma etching process in accordance with the detected end point.