MEMS pressure transducer assembly
An assembly ( 20 ) includes a MEMS die ( 22 ) having a pressure transducer device ( 40 ) formed on a substrate ( 44 ) and a cap layer ( 38 ). A packaging process ( 74 ) entails forming the device ( 40 ) on the substrate, creating an aperture ( 70 ) through a back side ( 58 ) of the substrate underlying a diaphragm ( 46 ) of the device ( 40 ), and coupling a cap layer ( 38 ) to the front side of the substrate overlying the device. A trench ( 54 ) is produced extending through both the cap layer and the substrate, and the trench surrounds a cantilevered platform ( 48 ) at which the diaphragm resides. The MEMS die is suspended above a substrate ( 26 ) so that a clearance space ( 60 ) is formed between the cantilevered platform and the substrate. The diaphragm is exposed to an external environment ( 68 ) via the aperture, the clearance space, and an external port.
1. An assembly comprising:
a device structure having a cantilevered platform formed therein, wherein a trench extends through said device structure surrounding said cantilevered platform;
a microelectromechanical systems (MEMS) device formed at a front side of said device structure, said MEMS device having an active region residing on said cantilevered platform, and an aperture extends through said device structure underlying said active region of said MEMS device; and
a cap layer coupled to said front side of said device structure overlying said MEMS device, wherein at least a portion of said cap layer is attached to said cantilevered platform to form a sealed cavity in which said active region is located.
2. The assembly of claim 1 wherein said MEMS device comprises a pressure transducer, said pressure transducer including a movable diaphragm in said active region, said movable diaphragm being exposed to an external environment via said aperture.
3. The assembly of claim 2 wherein said movable diaphragm is movable relative to said cantilevered platform.
4. The assembly of claim 1 wherein said cantilevered platform has a sole attachment point to said device structure surrounding said cantilevered platform.
5. The assembly of claim 1 further comprising a base substrate attached to a back side of said device structure such that a clearance space is formed between said cantilevered platform and said base substrate, said cantilevered platform being suspended above said base substrate.
6. The assembly of claim 5 further comprising an adhesive attaching said back side of said device structure to said base substrate, said adhesive having a thickness sufficient to produce said clearance space underlying said cantilevered platform.
7. The assembly of claim 5 wherein said trench additionally extends through said cap layer surrounding said cantilevered platform, said clearance space and said aperture are in communication with said trench, and said active region is exposed to an external environment via said trench, said clearance space, and said aperture.
8. The assembly of claim 7 further comprising a protective cap over said trench and said cap layer overlying said cantilevered platform, wherein said protective cap includes a port extending through said protective cap to expose said trench to said external environment.
9. The assembly of claim 5 wherein said base substrate includes a cutout in said base substrate to produce said clearance space.
10. The assembly of claim 9 wherein said cutout extends through an entirety of said base substrate so that said active region is exposed to an external environment via said cutout, said clearance space, and said aperture.
11. The assembly of claim 1 wherein said MEMS device includes conductive traces formed at said front side of said device structure, and said cap layer covers said conductive traces such that said conductive traces reside in said sealed cavity.
12. The assembly of claim 11 wherein said sealed cavity is sized to provide a gap between said cap layer and said conductive traces.
13. An assembly comprising:
a device structure having a cantilevered platform formed therein, wherein a trench extends through said device structure surrounding said cantilevered platform, and said cantilevered platform has a sole attachment point to said device structure surrounding said cantilevered platform;
a microelectromechanical systems (MEMS) device formed at a front side of said device structure, said MEMS device having an active region residing on said cantilevered platform, and an aperture extends through said device structure underlying said active region of said MEMS device, wherein said MEMS device comprises a pressure transducer, said pressure transducer including a movable diaphragm in said active region, said movable diaphragm being exposed to an external environment via said aperture; and
a cap layer coupled to said front side of said device structure overlying said MEMS device, wherein at least a portion of said cap layer is attached to said cantilevered platform to form a sealed cavity in which said movable diaphragm is located.
14. The assembly of claim 13 wherein said movable diaphragm is movable relative to said cantilevered platform.
15. The assembly of claim 13 wherein said MEMS device includes conductive traces formed at said front side of said device structure, and said cap layer covers said conductive traces such that said conductive traces reside in said sealed cavity.
16. The assembly of claim 15 wherein said sealed cavity is sized to provide a gap between said cap layer and said conductive traces.
17. An assembly comprising:
a device structure having a cantilevered platform formed therein, wherein a trench extends through said device structure surrounding said cantilevered platform;
a microelectromechanical systems (MEMS) device formed at a front side of said device structure, said MEMS device having an active region residing on said cantilevered platform, and an aperture extends through said device structure underlying said active region of said MEMS device;
a cap layer coupled to said front side of said device structure overlying said MEMS device, wherein said trench additionally extends through said cap layer surrounding said cantilevered platform, and at least a portion of said cap layer is attached to said cantilevered platform to form a sealed cavity in which said active region is located; and
a base structure attached to a back side of said device structure such that a clearance space is formed between said cantilevered platform and said base structure, said cantilevered platform being suspended above said base structure.
18. The assembly of claim 17 wherein said MEMS device comprises a pressure transducer, said pressure transducer including a movable diaphragm in said active region, said movable diaphragm being movable relative to said cantilevered platform, and said movable diaphragm being exposed to an external environment via said aperture.
19. The assembly of claim 17 wherein said clearance space and said aperture are in communication with said trench, and said active region is exposed to an external environment via said trench, said clearance space, and said aperture.
20. The assembly of claim 17 wherein said base structure includes a cutout extending through an entirety of said base structure so that said active region is exposed to an external environment via said cutout, said clearance space, and said aperture.