IP Library Granted Patent US 9,410,243
Granted Patent B2
US 9,410,243 · App. 14/453,314 · Granted Aug 9, 2016

Method for forming monolayer graphene-boron nitride heterostructures

Inventors: Peter Werner Sutter (Westhampton Beach, NY); Eli Anguelova Sutter (Westhampton Beach, NY)
Assignee: Brookhaven Science Associates, LLC
C23C16/342C01B31/0453C01B31/0484C01B35/14C23C16/26C30B25/02C30B25/18C30B29/02H01L21/0243H01L21/0254H01L21/0259H01L21/0262H01L21/02425H01L21/02433H01L21/02444H01L21/02499H01L21/02527
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Quick Facts
Patent No.
US 9,410,243
App. No.
14/453,314
Granted
Aug 9, 2016
Kind
B2
Abstract

A method for fabricating monolayer graphene-boron nitride heterostructures in a single atomically thin membrane that limits intermixing at boundaries between graphene and h-BN, so as to achieve atomically sharp interfaces between these materials. In one embodiment, the method comprises exposing a ruthenium substrate to ethylene, exposing the ruthenium substrate to oxygen after exposure to ethylene and exposing the ruthenium substrate to borazine after exposure to oxygen.

Claims (28)

1. A method for forming a graphene boron nitride interface, comprising:

exposing a ruthenium substrate to ethylene;

exposing the ruthenium substrate to oxygen after exposure to ethylene;

stopping exposure to oxygen when C adatoms have been substantially eliminated from portions of the ruthenium substrate that are not covered by monolayer graphene domains; and

exposing the ruthenium substrate to borazine after exposure to oxygen.

2. The method according to claim 1 , further comprising:

stopping exposure to ethylene upon partial coverage of the ruthenium substrate with monolayer graphene domains.

3. The method according to claim 1 , wherein exposing the ruthenium substrate to ethylene further comprises:

exposure to ethylene under 10 −8 Torr and 800° C. and stopping exposure to ethylene exposure after approximately 400 seconds.

4. The method according to claim 1 , wherein the exposures to ethylene and borazine exposure are performed via ultrahigh vacuum chemical vapor deposition.

5. The method according to claim 1 , wherein the ruthenium substrate comprises a Ru(0001) single crystal substrate.

6. The method according to claim 1 , wherein the ruthenium substrate comprises an epitaxial Ru(0001) thin film on a sapphire substrate.

7. The method according to claim 1 , wherein the exposure to ethylene occurs at a pressure of 1×10 −8 Torr.

8. The method according to claim 1 , wherein the exposure to ethylene occurs at a temperature between 740° C. to 800° C.

9. The method according to claim 1 , wherein the exposure to oxygen occurs at a pressure of 2×10 −9 Torr.

10. The method according to claim 1 , wherein the exposure to oxygen occurs at a temperature between 610° C. to 680° C.

11. The method according to claim 1 , wherein the exposure to borazine occurs at a pressure of 1×10 −7 Torr.

12. The method according to claim 1 , wherein the step of exposure to borazine occurs at a temperature of 680° C.

13. The method according to claim 1 , wherein the ethylene is 99.999 percent pure.

14. The method according to claim 1 , wherein the borazine is 99.999 percent pure.

15. The method according to claim 1 , wherein the oxygen (O 2 ) is 99.999 percent pure O 2 .

16. The method according to claim 1 , wherein after exposing the ruthenium substrate to borazine the ruthenium substrate is covered by a graphene-boron nitride heterostructure having an abrupt interface between graphene and boron nitride.

17. The method according to claim 1 , wherein after exposing the ruthenium substrate to borazine the ruthenium substrate is covered by homogeneous ternary C—B—N alloy phases having a non-abrupt interface between graphene and boron nitride.

18. A method for synthesizing tunable homogeneous ternary C—B—N alloy phases, comprising:

exposing a ruthenium substrate to ethylene sufficient to form the homogeneous ternary C—B—N alloy phases;

exposing the ruthenium substrate to oxygen after exposure to ethylene;

exposing the ruthenium substrate to borazine after exposure to oxygen sufficient to form the homogeneous ternary C—B—N alloy phases, wherein the homogeneous ternary C—B—N alloy phases are formed as a uniform 2D membrane.

19. The method according to claim 18 , wherein the homogeneous ternary C—B—N alloy phases are formed at the interface between boron nitride and graphene.

Assignments (2)
CONFIRMATORY LICENSE Recorded Nov 21, 2014
From: BROOKHAVEN SCIENCE ASSOCIATES, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 034414/0574 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 22, 2014
From: SUTTER, ELI ANGUELOVA; SUTTER, PETER WERNER
To: BROOKHAVEN SCIENCE ASSOCIATES, LLC
Reel/Frame 033591/0960 →
Continuity (2)
Provisional Application 61862815 · Aug 6, 2013
Related Publication 20150044367A1 · Feb 12, 2015