Piezoelectric acoustic resonator based sensor

1. A device, comprising:

an array of piezoelectric transducers; and

an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators comprising a fingerprint sensor, wherein a first resonator of the array of resonators corresponds to a first frequency response representing the first resonator has been touched by a first ridge of a finger, and wherein a second resonator of the array of resonators corresponds to a second frequency response representing the second resonator has not been touched by a second ridge of the finger.

2. The device of claim 1 , wherein the first resonator is an acoustic resonator.

3. The device of claim 2 , wherein the first resonator is a Helmholtz resonator.

4. The device of claim 1 , wherein the array of piezoelectric transducers comprises:

a piezoelectric material;

a first set of electrodes that has been formed a first side of the piezoelectric material; and

a second set of electrodes that has been formed on second side of the piezoelectric material, wherein a piezoelectric transducer of the array of piezoelectric transducers corresponding to the first resonator comprises a first electrode of the first set of electrodes and a second electrode of the second set of electrodes.

5. The device of claim 4 , wherein a first end of a cavity of the array of cavities corresponding to the first resonator is smaller than a second end of the cavity.

6. The device of claim 5 , wherein the first end of the cavity is open to an environment.

7. The device of claim 5 , wherein the cavity has been filled with a first material corresponding to a first acoustic velocity that is different from a second acoustic velocity corresponding to a second material that is adjacent to the cavity.

8. The device of claim 5 , wherein the first end of the cavity comprises a portion of the first resonator that has been touched.

9. The device of claim 4 , wherein the piezoelectric transducer of the array of piezoelectric transducers corresponding to the first resonator comprises a portion of the first resonator that has been touched.

10. A system, comprising:

an array of piezoelectric transducers;

an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators comprising a fingerprint sensor;

a memory to store instructions; and

a processor coupled to the memory, that facilitates execution of the instructions to perform operations, comprising:

determining a first frequency response of a first resonator of the array of resonators representing the first resonator has been touched by a first ridge of a finger, wherein the first resonator comprises a first piezoelectric transducer of the array of piezoelectric transducers and a first cavity of the array of cavities;

determining a second frequency response of a second resonator of the array of resonators representing the second resonator has not been touched by a second ridge of the finger, wherein the second resonator comprises a second piezoelectric transducer of the array of piezoelectric transducers and a second cavity of the array of cavities; and

based on the first frequency response and the second frequency response, deriving a fingerprint.

11. The system of claim 10 , wherein the determining the first frequency response comprises determining a resonant frequency of the first resonator.

12. The system of claim 11 , wherein the operations further comprise:

in response to determining that the resonant frequency has increased, determining that the first resonator has been touched by the first ridge of the finger.

13. The system of claim 10 , wherein the determining the first frequency response comprises determining a quality factor of the first resonator.

14. The system of claim 13 , wherein the operations further comprise:

in response to determining that the quality factor has decreased, determining that the first resonator has been touched by the first ridge of the finger.

15. The system of claim 10 , wherein the array of piezoelectric transducers comprises:

a piezoelectric material;

a first array of electrodes that have been formed on a first side of the piezoelectric material; and

a second array of electrodes that have been formed on a second side of the piezoelectric material, wherein the first piezoelectric transducer comprises a first electrode of the first array of electrodes and a second electrode of the second array of electrodes.

16. The system of claim 10 , wherein a first portion of the first cavity is smaller than a second portion of the first cavity.

17. The system of claim 16 , wherein the first portion of the first cavity is open to an environment.

18. The system of claim 16 , wherein the first cavity has been filled with a first material corresponding to a first acoustic velocity that is different from a second acoustic velocity corresponding to a second material that is adjacent to the first cavity.

19. The system of claim 16 , wherein the first portion of the first cavity corresponds to a portion of the first resonator that has been touched.

20. The system of claim 10 , wherein the determining the second frequency response comprises determining a resonant frequency of the second resonator, and wherein the operations further comprise:

in response to determining that the resonant frequency has not changed, determining that the second resonator has not been touched by the second ridge of the finger.

21. A method, comprising:

forming an array of piezoelectric transducers on a first substrate;

forming one or more portions of an array of cavities using a second substrate;

attaching the array of piezoelectric transducers to the second substrate to form an array of resonators of a fingerprint sensor, wherein a first resonator of the array of resonators is associated with a first frequency response corresponding to a determined touch of the first resonator by a first ridge of a finger, and wherein a second resonator of the array of resonators is associated with a second frequency response corresponding to a determined non-touch of the resonator by a second ridge of the finger; and

removing the first substrate from the array of piezoelectric transducers.

22. The method of claim 21 , wherein the forming of the array of piezoelectric transducers comprises:

forming a first set of electrodes on a first side of a piezoelectric material; and

forming a second set of electrodes on a second side of the piezoelectric material, wherein a piezoelectric transducer of the array of piezoelectric transducers corresponding to the first resonator comprises a first electrode of the first set of electrodes and a second electrode of the second set of electrodes.

23. The method of claim 21 , wherein the first resonator comprises a Helmholtz resonator.

24. The method of claim 23 , further comprising:

filling a cavity of the array of cavities corresponding to the Helmholtz resonator with a material having a first acoustic velocity that is different from a second acoustic velocity of the second substrate.

25. The method of claim 21 , further comprising:

in response to determining that a first resonant frequency of the first resonator has increased, determining that the first resonator has been touched by the first ridge; and

in response to determining that a second resonant frequency of the second resonator has not changed, determining that the second resonator has not been touched.