Device and method for depositing organic material
A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.
1. A method for depositing an organic material on a substrate, the method comprising:
fixing a substrate and a mask having an opening portion and a shield portion to a fixing member;
providing a deposition source having a plurality of nozzles arranged in a first direction;
forming a plurality of shield plates near the plurality of nozzles and on the deposition source; and
spraying an organic material through the plurality of nozzles while moving the deposition source in a second direction crossing the first direction,
wherein an angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle φ of the shield portion of the mask.
2. The method of claim 1 , wherein:
a distance t between the substrate and the plurality of nozzles satisfies the equation
t
=
n
·
L
2
·
tan
(
90
°
-
θ
)
,
where n is a natural number and L is a distance between adjacent nozzles from among the plurality of nozzles.
3. The method of claim 1 , wherein:
the shield plates comprise a first shield plate extending in the first direction and a second shield plate extending in the second direction, and wherein
a height of the second shield plate that is measured in a direction from the deposition source toward the substrate is not constant.
4. The method of claim 1 , wherein:
the shield plates comprise a first shield plate formed in the first direction and a second shield plate connected to the first shield plate, and wherein
the second shield plate that is connected to the first shield plate comprises a pair of plates that are not in parallel to each other.
5. The method of claim 1 , wherein:
a distance between adjacent nozzles from among the plurality of nozzles is constant.
6. The method of claim 1 , wherein:
a distance between adjacent nozzles from among the plurality of nozzles is not constant.
7. The method of claim 1 , further comprising:
depositing the organic material on the substrate through the plurality of nozzles while moving the deposition source in the second direction;
moving the deposition source in the first direction by half of a distance between adjacent nozzles of the plurality of nozzles; and
depositing the organic material on the substrate through the plurality of nozzles while moving the deposition source in an opposite direction of the second direction.