IP Library Granted Patent US 10,081,170
Granted Patent B2
US 10,081,170 · App. 14/462,893 · Granted Sep 25, 2018

Laminating apparatus

Inventors: Ryoichi Yasumoto (Machida, JP); Kazutoshi Iwata (Machida, JP); Kinya Kodama (Annaka, JP); Grigoriy Basin (San Francisco, CA)
Assignees: NIKKO-MATERIALS CO., LTD.; SHIN-ETSU CHEMICAL CO., LTD.
B32B37/10B29C43/18B32B37/1009B32B39/00B32B37/003B32B2309/12B32B2309/65B32B2309/68B32B2457/08H01L33/52H05K3/284H05K2203/1311Y10T156/1744
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Quick Facts
Patent No.
US 10,081,170
App. No.
14/462,893
Granted
Sep 25, 2018
Kind
B2
Abstract

A laminating apparatus for a provisionally laminated body is provided and is configured to form an end laminated body including one of a first resin film and a second resin film conforming to protruding and recessed portions of a substrate. The laminating apparatus may include first and second laminating mechanisms. The first laminating mechanism may include a first enclosed space forming receiver, a depressurizer, a heater, and a first pressure laminator to form an intermediate laminated body from the provisionally laminated body. The second laminating mechanism may include a second enclosed space forming receiver, and a second pressure laminator to form the end laminated body from the intermediate laminated body.

Claims (20)

1. A laminating apparatus for a provisionally laminated body including a substrate having front and back surfaces at least one of which has an uneven surface comprising protruding and recessed portions, and one of a first resin film and a second resin film attached to the uneven surface of the substrate, the second resin film including a support film, the laminating apparatus being configured to form an end laminated body including one of the first resin film and the second resin film conforming to the protruding and recessed portions of the substrate, the laminating apparatus comprising:

a first laminating mechanism including:

a first enclosed space forming receiver capable of receiving the provisionally laminated body therein;

a depressurizer capable of placing a space between one of the first resin film and the second resin film and the substrate of the provisionally laminated body under a negative pressure in a first enclosed space formed by the first enclosed space forming receiver;

a heater configured to heat the one of the first resin film and the second resin film of the provisionally laminated body to provide a heated and softened one of the first resin film and the second resin film; and

a first pressure laminator for bringing a peripheral portion of the heated and softened one of the first resin film and the second resin film of the provisionally laminated body into intimate contact with the substrate and configured to form an intermediate laminated body having a depressurized enclosed space between the one of the first resin film and the second resin film and the substrate thereof, and

a second laminating mechanism including:

a second enclosed space forming receiver configured for receiving the intermediate laminated body therein; and

a second pressure laminator, which is configured for applying pressure to a second enclosed space formed by the second enclosed space forming receiver and to form the end laminated body in a non-contacting manner, in which the second pressure laminator is in a non-contacting relationship with the one of the first resin film and the second resin film, by creating air pressure difference between the second enclosed space and the depressurized enclosed space formed in the intermediate laminated body,

wherein the second pressure laminator further includes a controller for controlling the applying of the pressure.

2. The laminating apparatus according to claim 1 , wherein, as the first pressure laminator, a frame-shaped presser structured and arranged to be contactable with a periphery of the one of the first resin film and the second resin film for positively laminating the periphery of the one of the first resin film and the second resin film to the substrate is provided.

3. The laminating apparatus according to claim 1 , further comprising:

a first transporting mechanism for transporting the provisionally laminated body to the first laminating mechanism;

a second transporting mechanism for transporting to the second laminating mechanism the intermediate laminated body formed by the first laminating mechanism; and

a third transporting mechanism for transporting the end laminated body formed by the second laminating mechanism out of the second laminating mechanism.

4. The laminating apparatus according to claim 1 , further comprising:

a support film remover for removing the support film from the second resin film.

5. The laminating apparatus according to claim 1 , comprising:

a cutter for cutting one of the first resin film and the second resin film to a predetermined size; and

a precurer for precuring one of the first resin film and the second resin film.

Assignments (2)
CHANGE OF NAME Recorded Jul 13, 2015
From: YASUMOTO, RYOICHI; IWATA, KAZUTOSHI; KODAMA, KINYA; BASIN, GRIGORIY
To: NIKKO-MATERIALS CO., LTD.; SHIN-ETSU CHEMICAL CO., LTD.
Reel/Frame 036071/0950 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2015
From: YASUMOTO, RYOICHI; IWATA, KAZUTOSHI; BASIN, GRIGORIY; KODAMA, KINYA
To: NICHIGO-MORTON CO., LTD.,; SHIN-ETSU CHEMICAL CO., LTD.
Reel/Frame 035972/0290 →
Priority Claims (1)
JP 2010-185418 · Aug 20, 2010 · national
Continuity (2)
Division 13816540
Related Publication 20150027640A1 · Jan 29, 2015