Permanent magnetic chuck for OLED mask chucking
A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
1. A substrate carrier for use in a process chamber, the substrate carrier comprising:
a support base configured to move into and out of a process chamber, the support base comprising:
a substrate supporting surface; and
an electrode assembly operable to electrostatically chuck a substrate to the substrate supporting surface; and
a permanent magnetic mask chuck coupled to the support base, the permanent magnetic mask chuck comprising:
a chuck body having a first wall and a second wall, the first wall being proximate to the support base and the second wall being distal to the support base;
a plurality of permanent magnets positioned in the chuck body, the permanent magnets having a magnetic field; and
a positioning device to move the permanent magnetic mask chuck independent of the support base.
2. The substrate carrier of claim 1 , wherein the plurality of permanent magnets are positionable within the chuck body such that a first magnet is closer to the substrate supporting surface than a second magnet.
3. The substrate carrier of claim 1 , wherein the plurality of permanent magnets are moveable relative to the substrate supporting surface.
4. The substrate carrier of claim 3 , further comprising an actuator disposed in the chuck body and operable to control the position of the permanent magnets relative to the substrate supporting surface.
5. The substrate carrier of claim 1 , wherein the plurality of permanent magnets are positionable to produce a magnetic force which applies more force to one portion of the mask relative to another portion of the mask.
6. The substrate carrier of claim 4 , wherein the positioning device is operable to move the plurality of permanent magnets to produce a stronger magnetic force at one portion of the substrate supporting surface relative to another portion of the substrate supporting surface.
7. The substrate carrier of claim 4 , wherein the positioning device is operable to move the permanent magnets closer to the substrate supporting surface in a center to edge sequence or an edge to opposite edge sequence.
8. The substrate carrier of claim 1 , wherein the plurality of permanent magnets facing the substrate supporting surface have alternating polarity.