Semiconductor device and method of manufacturing same
In a semiconductor device in which a plurality of semiconductor chips are stacked, performance is enhanced without deteriorating productivity. The semiconductor device has a plurality of elements, an interlayer insulating film, a pad, and a bump electrode electrically connected with the pad sequentially formed on a main surface of a silicon substrate and has a back-surface electrode formed on a back surface of the silicon substrate and electrically connected with the bump electrode. The bump electrode has a protruding portion penetrating through the pad and protruding toward the silicon substrate side. The back-surface electrode is formed so as to reach the protruding portion of the bump electrode from the back surface side of the silicon substrate toward the main surface side and to cover the inside of a back-surface electrode hole portion which does not reach the pad, so that the back-surface electrode is electrically connected with the bump electrode.
1. A semiconductor device comprising:
a semiconductor substrate having a main surface and a back surface positioned on an opposite side to the main surface;
a first insulating film formed on the main surface of the semiconductor substrate;
a first hole formed in the first insulating film;
a second hole formed in the back surface of the semiconductor substrate;
an electrode having a first portion which is formed at least in and entirely fills the first hole and a protruding portion which extends from the semiconductor substrate; and
a conductive film conformally formed in the second hole and electrically connected to a bottom surface of the electrode, the conductive film leaving a third hole in the semiconductor substrate open to the back surface configured to receive a second electrode of a second semiconductor substrate.
2. The semiconductor device according to claim 1 , wherein a protective insulating film is formed at a boundary portion between the electrode and the semiconductor substrate so that the electrode and the semiconductor substrate are electrically insulated from each other.
3. The semiconductor device according to claim 1 , further comprising a second insulating film formed at a boundary portion between the conductive film and the semiconductor substrate so that the conductive film and the semiconductor substrate are electrically insulated from each other.
4. The semiconductor device according to claim 1 , wherein the electrode is disposed over at least a portion of the first insulating film.
5. The semiconductor device according to claim 1 , wherein the first portion of the electrode exposed above the first insulating film has a tapered shape.
6. The semiconductor device according to claim 5 , wherein the tapered shape of the electrode has sides with an angular inclination having an angle greater than or equal to 45 degrees to less than 70 degrees.
7. The semiconductor device according to claim 5 , wherein the tapered shape of the electrode has sides with an angular inclination having an angle greater than or equal to 70 degrees to less than 90 degrees.
8. The semiconductor device according to claim 1 , wherein a portion of the electrode exposed above the first insulating film is shaped to be inserted into a fourth hole of a third semiconductor substrate.
9. The semiconductor device according to claim 8 , wherein the portion of the electrode exposed above the first insulating film is further shaped by plastic deformation.
10. The semiconductor device according to claim 1 , wherein the conductive film is further connected to a side surface of the electrode.
11. The semiconductor device according to claim 1 , wherein:
the electrode includes a seed layer and a metal film;
the seed layer includes one or more materials selected from a group consisting of Ti and TiW; and
the metal film includes one or more materials selected from a group consisting of Au, Cu, Al, and Ni.
12. The semiconductor device according to claim 1 , wherein:
the conductive film includes a seed layer and a metal film;
the seed layer includes Au and one or more materials selected from a group consisting of Ti and Cr; and
the metal film includes one or more materials selected from a group consisting of Au, Cu, Al, and Ni.
13. The semiconductor device according to claim 1 , wherein, in a planar view, a diameter of the protruding portion is smaller than a diameter of the second hole.
14. The semiconductor device according to claim 1 , wherein, in a planar view, a shape of a perimeter of the second hole is circular or polygonal.
15. The semiconductor device according to claim 1 , wherein, in a planar view, a shape of a perimeter of a portion of the electrode exposed above the first insulating film is circular, oval, or polygonal.
16. The semiconductor device according to claim 1 , wherein:
a pad is formed between the first insulating film and the electrode; and
the second hole does not reach the pad.
17. The semiconductor device according to claim 16 , wherein the pad is electrically connected to one or more circuit elements on the semiconductor substrate via multi-layer wiring.