Plasma corrosion resistive heater for high temperature processing
Implementations described herein protect a substrate support from corrosive cleaning gases used at high temperatures. In one embodiment, a substrate support has a shaft and a heater. The heater has a body. The body has a top surface, a side surface and a bottom surface. The top surface is configured to support a substrate during plasma processing of the substrate. A covering is provided for at least two of the top surface, side surface and bottom surface. The covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius.
1. A substrate support, comprising:
a shaft;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending inward from the side surface to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least two of the top surface, the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius; and
a sleeve circumscribing the shaft, the sleeve and the shaft forming a space therebetween adapted to flow a purge gas therethrough in a direction toward the body, wherein the sleeve further comprises:
a gap formed between the sleeve and the bottom surface of the heater, wherein the purge gas flowing into the space flows towards the heater and exits the space through the gap; and
a portion extending away from the shaft along the bottom surface of the body, the space defined between the shaft and the sleeve continuing along the bottom surface of the body.
2. The substrate support of claim 1 wherein the covering is a coating of material selected from the group consisting of an aluminum silicon magnesium yttrium oxygen compound, Y 4 Al 2 O 9 compound and Y 2-x Zr x O 3 solid solution mixed material (HPM), yttria (Y 2 O 3 ), erbium oxide (Er 2 O 3 ), and zirconium dioxide (ZrO 2 ).
3. The substrate support of claim 1 wherein the covering is a coating comprising aluminum silicon magnesium yttrium oxygen compound (AsMy).
4. The substrate support of claim 1 , wherein the covering for the top surface comprises:
an edge ring; and
a removable cover plate.
5. The substrate support of claim 4 , wherein the edge ring and the removable cover plate comprises bulk AsMy.
6. The substrate support of claim 4 , wherein the edge ring and the removable cover plate are formed from AlN coated with AsMy.
7. The substrate support of claim 3 , wherein the AsMy coating is about 8 mil thick.
8. The substrate support claim 6 , wherein the AsMy coating is heat treated.
9. A substrate support, comprising:
a shaft;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending inward from the side surface to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least two of the top surface, the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius;
a sleeve circumscribing the shaft, the sleeve and the shaft forming a space therebetween adapted to flow a purge gas therethrough in a direction toward the body;
a thermal isolator coupled to a bottom of the shaft opposite the heater, wherein the sleeve is sealingly attached to the thermal isolator; and
a second space formed between the sleeve and the bottom surface of the heater, wherein the second space is fluidly coupled to the first space and extends to an outer periphery of the heater, wherein the purge gas flowing into the space flows towards the heater, enters the second space flowing away from the shaft and exits the second space through an opening.
10. The substrate support of claim 9 , wherein the sleeve is not in direct contact with either the shaft or the heater.