Semiconductor device
According to an embodiment, a semiconductor device includes at least two control electrodes, a plurality of semiconductor layers and an insulating film. Each control electrode extends in a first direction. The semiconductor layers are provided between the control electrodes, and arranged in the first direction. Each semiconductor layer extends in a second direction orthogonal to the first direction. The insulating film covers side surfaces of the semiconductor layers, and is disposed between the control electrodes. Each semiconductor layer has a side surface that includes at least one curved surface swelling in a direction from a center of the semiconductor layer to the insulating film.
1. A semiconductor device, comprising:
a first semiconductor layer;
at least two control electrodes each extending in a first direction the first semiconductor layer being provided between the at least two control electrodes and extending in a second direction crossing the first direction, the first semiconductor layer being disposed between the at least two control electrodes in a third direction, the third direction crossing a plane that includes the first direction and the second direction;
an insulating film disposed between the at least two control electrodes in the third direction and covering a side surface of the first semiconductor layer, the side surface of the first semiconductor layer including at least one curved surface swelling in a direction from a center of the first semiconductor layer to the insulating film;
a first wiring extending in the third direction, the first semiconductor layer being provided on the first wiring and electrically connected to the first wiring;
a second wiring provided on the first semiconductor layer and extending in the second direction, the second wiring electrically connected to the first semiconductor layer; and
a second semiconductor layer provided between the at least two control electrodes and arranged in the first direction with the first semiconductor layer,
wherein the insulating film includes a first portion provided between the first semiconductor layer and each of the at least two control electrodes, and a second portion provided between the first semiconductor layer and the second semiconductor layer.
2. The device according to claim 1 , wherein the side surface of the first semiconductor layer includes plane portions each facing any one of the at least two control electrodes, and curved surfaces located on both sides of each plane portion in the first direction.
3. The device according to claim 1 , wherein the first semiconductor layer has a shape of a circle, an ellipse, or a polygon having four or more sides in a cross-section orthogonal to the second direction.
4. The device according to claim 1 , wherein the curved surface continuously extends in the second direction.
5. The device according to claim 1 , wherein the curved surface has a curvature radius not less than 1 nanometer.
6. The device according to claim 1 , wherein each of the at least two control electrodes includes a concave surface, and an interval is constant along the concave surface between each control electrode of the at least two control electrodes and the first semiconductor layer facing thereto.
7. The device according to claim 1 , wherein the second portion has a width in the first direction larger than a width of the first portion in the third direction.
8. The device according to claim 1 , wherein
the first semiconductor layer includes a first diffusion portion, a second diffusion portion, and a channel portion provided between the first diffusion portion and the second diffusion portion, wherein
the first diffusion portion is provided between the first wiring and the channel portion;
the second diffusion portion is provided between the second wiring and the channel portion, and
the channel portion faces the at least two control electrodes via the insulating film.
9. The device according to claim 8 , wherein each of the first diffusion portion and the second diffusion portion has n-type conductivity.
10. The device according to claim 1 , further comprising:
a third wiring adjacent to the second wiring, the third wiring extending in the first direction; and
a memory cell provided at an intersecting portion of the second wiring and the third wiring.
11. The device according to claim 10 , wherein the memory cell includes a resistance change film provided between the second wiring and the third wiring, which reversibly transitions from a first resistance value to a second resistance value, when applying a voltage thereto, or flowing an electric current therethrough.
12. The device according to claim 8 , further comprising:
a third wiring adjacent to the second wiring, the third wiring extending in the first direction; and
a memory cell provided at an intersecting portion of the second wiring and the third wiring.
13. The device according to claim 12 , wherein the memory cell includes a resistance change film provided between the second wiring and the third wiring, which reversibly transitions from a first resistance value to a second resistance value, when applying a voltage thereto, or flowing an electric current therethrough.