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App. No. 14/465,247 · Confirmation No. 7139

SEMICONDUCTOR MANUFACTURING EQUIPMENT AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

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2018-11-19 ABN Abandonment 2 View
2018-04-12 CTFR Final Rejection 9 View
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2018-04-12 FWCLM Index of Claims 1 View
2018-01-08 WFEE Fee Worksheet (SB06) 1 View
2018-01-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2018-01-08 CLM Claims 6 View
2018-01-08 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2018-01-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-11-02 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2017-11-02 APP.FILE.REC Filing Receipt 4 View
2017-10-29 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2017-10-29 ADS Application Data Sheet 6 View
2017-10-29 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2017-10-29 PA.. Power of Attorney 2 View
2017-10-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-10-06 CTNF Non-Final Rejection 7 View
2017-10-06 892 List of references cited by examiner 1 View
2017-10-06 SRFW Search information including classification, databases and other search related notes 2 View
2017-10-06 FWCLM Index of Claims 1 View
2017-08-11 RCEX Request for Continued Examination (RCE) 2 View
2017-08-11 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2017-08-11 CLM Claims 5 View
2017-08-11 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2017-08-11 WFEE Fee Worksheet (SB06) 2 View
2017-08-11 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-08-11 WFEE Fee Worksheet (SB06) 1 View
2017-08-11 WFEE Fee Worksheet (SB06) 1 View
2017-05-11 CTFR Final Rejection 7 View
2017-05-11 892 List of references cited by examiner 1 View
2017-05-11 FWCLM Index of Claims 1 View
2017-05-11 1449 List of References cited by applicant and considered by examiner 1 View
2017-05-11 SRFW Search information including classification, databases and other search related notes 1 View
2017-03-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2017-03-01 CLM Claims 4 View
2017-03-01 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2017-03-01 TRAN.LET Transmittal Letter 4 View
2017-03-01 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2017-03-01 FOR Foreign Reference 10 View
2017-03-01 FOR Foreign Reference 21 View
2017-03-01 FOR Foreign Reference 22 View
2017-03-01 FOR Foreign Reference 16 View
2017-03-01 FOR Foreign Reference 20 View
2017-03-01 FOR Foreign Reference 20 View
2017-03-01 FOR Foreign Reference 12 View
2017-03-01 FOR Foreign Reference 31 View
2017-03-01 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-03-01 WFEE Fee Worksheet (SB06) 1 View
2016-12-01 CTNF Non-Final Rejection 7 View
2016-12-01 892 List of references cited by examiner 1 View
2016-12-01 SRNT Examiner's search strategy and results 3 View
2016-12-01 1449 List of References cited by applicant and considered by examiner 1 View
2016-12-01 1449 List of References cited by applicant and considered by examiner 1 View
2016-12-01 BIB Bibliographic Data Sheet 1 View
2016-12-01 1449 List of References cited by applicant and considered by examiner 1 View
2016-12-01 SRNT Examiner's search strategy and results 1 View
2016-12-01 FWCLM Index of Claims 1 View
2016-12-01 SRFW Search information including classification, databases and other search related notes 1 View
2016-10-07 ELC. Response to Election / Restriction Filed 2 View
2016-10-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-08-31 CTRS Requirement for Restriction/Election 8 View
2016-08-31 FWCLM Index of Claims 1 View
2015-09-10 NTC.PUB Notice of Publication 1 View
2015-06-28 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 18 View
2014-10-02 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2014-10-02 FOR Foreign Reference 12 View
2014-10-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-10-02 TRAN.LET Transmittal Letter 2 View
2014-08-28 WFEE Fee Worksheet (SB06) 1 View
2014-08-28 APP.FILE.REC Filing Receipt 3 View
2014-08-28 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2014-08-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-08-28 TRAN.LET Transmittal Letter 2 View
2014-08-22 PA.. Power of Attorney 1 View
2014-08-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-08-22 PA.. Power of Attorney 1 View
2014-08-22 OATH Oath or Declaration filed 3 View
2014-08-21 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2014-08-21 FOR Foreign Reference 9 View
2014-08-21 FOR Foreign Reference 10 View
2014-08-21 FOR Foreign Reference 12 View
2014-08-21 FOR Foreign Reference 18 View
2014-08-21 FOR Foreign Reference 11 View
2014-08-21 WFEE Fee Worksheet (SB06) 2 View
2014-08-21 N417 Electronic Filing System Acknowledgment Receipt 4 View
2014-08-21 TRNA Transmittal of New Application 2 View
2014-08-21 SPEC Specification 15 View
2014-08-21 CLM Claims 3 View
2014-08-21 ABST Abstract 1 View
2014-08-21 DRW Drawings-only black and white line drawings 5 View
2014-08-21 OATH Oath or Declaration filed 2 View
2014-08-21 ADS Application Data Sheet 6 View
2014-08-21 TRAN.LET Transmittal Letter 2 View
2014-08-21 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
14/465,247
Filed
2014-08-21
Pub. No.
US20150255317A1
Examiner
VAN, QUANG T
Art Unit
3761