Semiconductor device
View Patent ↗Provided is a semiconductor device including a substrate, a gate structure, a second dielectric layer and a source/drain region. A first dielectric layer is disposed on the substrate, and the first dielectric layer has a trench therein. The gate structure is disposed on the substrate in the trench and includes a work function metal layer and a metal layer. The work function metal layer is disposed in the trench, and includes a TiAl 3 phase metal layer. A height of the work function metal layer disposed on a sidewall of the trench is lower than a height of a top surface of the first dielectric layer. The metal layer fills the trench. The second dielectric layer is disposed between the gate structure and the substrate. The source/drain region is disposed in the substrate at two sides of the gate structure.
1. A semiconductor device, comprising:
a substrate, having a first dielectric layer thereon, wherein the first dielectric layer has a trench therein;
a gate structure, disposed on the substrate in the trench and comprising:
a work function metal layer, disposed in the trench, and comprising a TiAl 3 phase metal layer, wherein a height of the work function metal layer disposed on a sidewall of the trench is lower than a height of a top surface of the first dielectric layer; and
a metal layer filling the trench;
a second dielectric layer, disposed between the gate structure and the substrate; and
a source/drain region, disposed in the substrate at two sides of the gate structure.
2. The semiconductor device as claimed in claim 1 , wherein the work function metal layer comprises:
a Ti-containing metal layer;
the TiAl 3 phase metal layer, disposed on the Ti-containing metal layer; and
an Al metal layer, disposed on the TiAl 3 phase metal layer.
3. The semiconductor device as claimed in claim 2 , wherein the Ti-containing metal layer comprises a TiAl layer or a Ti layer.
4. The semiconductor device as claimed in claim 1 , wherein the work function metal layer comprises:
a Ti-containing metal layer; and
the TiAl 3 phase metal layer, disposed on the Ti-containing metal layer.
5. The semiconductor device as claimed in claim 4 , wherein the Ti-containing metal layer comprises a TiAl layer or a Ti layer.
6. The semiconductor device as claimed in claim 1 , wherein the work function metal layer comprises:
the TiAl 3 phase metal layer; and
an Al metal layer, disposed on the TiAl 3 phase metal layer.
7. The semiconductor device as claimed in claim 1 , wherein the second dielectric layer comprises a high dielectric constant material.
8. The semiconductor device as claimed in claim 1 further comprising an interfacial layer disposed between the substrate and the second dielectric layer.
9. The semiconductor device as claimed in claim 1 further comprising a barrier layer disposed between the second dielectric layer and the gate structure.
10. The semiconductor device as claimed in claim 1 further comprising a spacer disposed on a sidewall of the gate structure.
11. The semiconductor device as claimed in claim 1 , wherein the metal layer is substantially shaped as “T”.
12. A semiconductor device, comprising:
a substrate, having a first dielectric layer thereon, wherein the first dielectric layer has a trench therein;
a gate structure, disposed on the substrate in the trench and comprising:
a work function metal layer, disposed in the trench, and comprising a TiAl 3 phase metal layer; and
a metal layer filling the trench, wherein the metal layer is substantially shaped as “T”;
a second dielectric layer, disposed between the gate structure and the substrate; and
a source/drain region, disposed in the substrate at two sides of the gate structure.
13. The semiconductor device as claimed in claim 12 , wherein the work function metal layer comprises:
a Ti-containing metal layer;
the TiAl 3 phase metal layer, disposed on the Ti-containing metal layer; and
an Al metal layer, disposed on the TiAl 3 phase metal layer.
14. The semiconductor device as claimed in claim 13 , wherein the Ti-containing metal layer comprises a TiAl layer or a Ti layer.
15. The semiconductor device as claimed in claim 12 , wherein the work function metal layer comprises:
a Ti-containing metal layer; and
the TiAl 3 phase metal layer, disposed on the Ti-containing metal layer.
16. The semiconductor device as claimed in claim 15 , wherein the Ti-containing metal layer comprises a TiAl layer or a Ti layer.
17. The semiconductor device as claimed in claim 12 , wherein the work function metal layer comprises:
the TiAl 3 phase metal layer; and
an Al metal layer, disposed on the TiAl 3 phase metal layer.
18. The semiconductor device as claimed in claim 12 , wherein the second dielectric layer comprises a high dielectric constant material.
19. The semiconductor device as claimed in claim 12 further comprising an interfacial layer disposed between the substrate and the second dielectric layer.
20. The semiconductor device as claimed in claim 12 further comprising:
a barrier layer disposed between the second dielectric layer and the gate structure; and
a spacer disposed on a sidewall of the gate structure.