Multi-chip silicon substrate-less chip packaging
Examples generally provide a stacked silicon interconnect product and method of manufacture. The stacked silicon interconnect product includes a silicon substrate-less interposer comprising a plurality of metallization layers, wherein at least one metallization layer includes a plurality of metal segments separated by dielectric material. The stacked silicon interconnect product also includes a first die coupled to a first side of the silicon substrate-less interposer via a first plurality of microbumps. The stacked silicon interconnect product further includes a second die coupled to a second side of the silicon substrate-less interposer via a second plurality of microbumps, the second die communicatively coupled to the first die through a metallization layer of the plurality of metallization layers.
1. A stacked silicon interconnect product, comprising:
a substrate-less interposer consisting essentially of a plurality of metallization layers, wherein at least one metallization layer includes a plurality of metal segments separated by dielectric material, the dielectric material selected from silicon dioxide, SiN, and SiC;
a first die coupled to a first side of the substrate-less interposer via a first plurality of microbumps;
a second die coupled to a second side of the substrate-less interposer via a second plurality of microbumps, the second die communicatively coupled to the first die through a metallization layer of the plurality of metallization layers without routing through a through-substrate via (TSV); and
a plurality of controlled collapse chip connection (C4) bumps coupled to the second side of the substrate-less interposer.
2. The stacked silicon interconnect product of claim 1 , wherein the substrate-less interposer further comprises:
a dielectric layer defining the second side of the substrate-less interposer, wherein the dielectric layer includes an opening exposing a metal segment included in the metallization layer.
3. The stacked silicon interconnect product of claim 2 , wherein the substrate-less interposer further comprises:
a passivation layer formed on the dielectric layer and having an opening that corresponds spatially with the opening in the dielectric layer.
4. The stacked silicon interconnect product of claim 3 , wherein the substrate-less interposer further comprises:
an under bump metal layer conformally formed in the opening of the dielectric layer, the under bump metal layer being in contact with the metallization layer.
5. The stacked silicon interconnect product of claim 1 , wherein the plurality of C4 bumps are located laterally outward from the second die on the second side of the substrate-less interposer.
6. The stacked silicon interconnect product of claim 1 , further comprising:
a first layer of underfill disposed between the first die and the first side of the substrate-less interposer.
7. The stacked silicon interconnect product of claim 6 , further comprising:
a second layer of underfill disposed between the second die and the second side of the substrate-less interposer.
8. The stacked silicon interconnect product of claim 1 , further comprising:
a third die coupled to the first side of the substrate-less interposer via a third plurality of microbumps communicatively coupled to the first metallization layers.
9. The stacked silicon interconnect product of claim 8 , further comprising:
a fourth die coupled to the second side of the substrate-less interposer via a fourth plurality of microbumps communicatively coupled to the second metallization layer.
10. The stacked silicon interconnect product of claim 1 , wherein:
the second side of the substrate-less interposer faces in an opposite direction to the first side of the substrate-less interposer.