Touch panel and electronic device
To provide a touch panel with reduced disturbance of display and with improved mechanical strength by suppressing variation in the space between a pair of substrates which form the touch panel even when in contact with an object to be detected. A pixel portion including a plurality of pixels is provided between a pair of substrates. Each pixel includes a photosensor portion which detects that the object to be detected is in contact with one of the pair of substrates, and a MEMS portion which generates a mechanical displacement in a direction perpendicular to the pair of substrates when a signal based on a detection result of the photosensor portion is input.
1. A semiconductor device comprising:
a first substrate;
a pixel over the first substrate, the pixel comprising:
a photosensor portion comprising a transistor comprising an oxide semiconductor and a photodiode; and
a MEMS portion comprising a MEMS element, and
a second substrate over the pixel,
wherein an insulating layer is over the transistor,
wherein the photodiode and the MEMS element are over the insulating layer,
wherein the photosensor portion is configured to detect light from an object contacting with a surface of the second substrate to determine a position and an area of a region where the object is contacting the surface of the second substrate,
wherein the MEMS portion corresponding to the position of the region is configured to generate a force corresponding to the area of the region in a direction perpendicular to the first substrate and the second substrate to maintain a constant distance between the first substrate and the second substrate in response to a signal supplied from a processing circuit.
2. The semiconductor device according to claim 1 ,
wherein the photodiode comprises an n-type semiconductor layer, an i-type semiconductor layer, and a p-type semiconductor layer, and
wherein the n-type semiconductor layer, the i-type semiconductor layer, and the p-type semiconductor layer are stacked.
3. The semiconductor device according to claim 1 ,
wherein the MEMS element comprises a first electrode, a second electrode, and a hollow region between the first electrode and the second electrode.
4. The semiconductor device according to claim 1 ,
wherein the MEMS element comprises a coil and a magnet.
5. The semiconductor device according to claim 1 ,
wherein the MEMS element comprises an electrode, an insulating film, and a hollow region between the electrode and the insulating film.
6. A semiconductor device comprising:
a first substrate;
a first pixel and a second pixel over the first substrate, each of the first pixel and the second pixel comprising:
a photosensor portion comprising a transistor comprising an oxide semiconductor and a photodiode; and
a MEMS portion comprising a MEMS element, and
a second substrate over the first pixel and the second pixel,
wherein an insulating layer is over the transistor,
wherein the photodiode and the MEMS element are over the insulating layer,
wherein, in each of the first pixel and the second pixel, the photosensor portion is configured to detect light from an object contacting with a surface of the second substrate to determine a position and an area of a region where the object is contacting the surface of the second substrate,
wherein, in each of the first pixel and the second pixel, the MEMS portion corresponding to the position of the region is configured to generate a force corresponding to the area of the region in a direction perpendicular to the first substrate and the second substrate to maintain a constant distance between the first substrate and the second substrate in response to a signal supplied from a processing circuit.
7. The semiconductor device according to claim 6 ,
wherein the photodiode comprises an n-type semiconductor layer, an i-type semiconductor layer, and a p-type semiconductor layer, and
wherein the n-type semiconductor layer, the i-type semiconductor layer, and the p-type semiconductor layer are stacked.
8. The semiconductor device according to claim 6 ,
wherein, in each of the first pixel and the second pixel, the MEMS element comprises a first electrode, a second electrode, and a hollow region between the first electrode and the second electrode.
9. The semiconductor device according to claim 6 ,
wherein, in each of the first pixel and the second pixel, the MEMS element comprises a coil and a magnet.
10. The semiconductor device according to claim 6 ,
wherein, in each of the first pixel and the second pixel, the MEMS element comprises an electrode, an insulating film, and a hollow region between the electrode and the insulating film.
11. A semiconductor device comprising:
a first substrate;
a plurality of pixels arranged in matrix over the first substrate, each of the plurality of pixels comprising:
a photosensor portion comprising a transistor comprising an oxide semiconductor and a photodiode; and
a MEMS portion comprising a MEMS element, and
a second substrate over the plurality of pixels,
wherein an insulating layer is over the transistor,
wherein the photodiode and the MEMS element are over the insulating layer,
wherein, in each of the plurality of pixels, the photosensor portion is configured to detect light from an object contacting with a surface of the second substrate to determine a position and an area of a region where the object is contacting the surface of the second substrate,
wherein, in each of the plurality of pixels, the MEMS portion corresponding to the position of the region is configured to generate a force corresponding to the area of the region in a direction perpendicular to the first substrate and the second substrate to maintain a constant distance between the first substrate and the second substrate in response to a signal supplied from a processing circuit.
12. The semiconductor device according to claim 11 ,
wherein the photodiode comprises an n-type semiconductor layer, an i-type semiconductor layer, and a p-type semiconductor layer, and
wherein the n-type semiconductor layer, the i-type semiconductor layer, and the p-type semiconductor layer are stacked.
13. The semiconductor device according to claim 11 ,
wherein, in each of the plurality of pixels, the MEMS element comprises a first electrode, a second electrode, and a hollow region between the first electrode and the second electrode.
14. The semiconductor device according to claim 11 ,
wherein, in each of the plurality of pixels, the MEMS element comprises a coil and a magnet.
15. The semiconductor device according to claim 11 ,
wherein, in each of the plurality of pixels, the MEMS element comprises an electrode, an insulating film, and a hollow region between the electrode and the insulating film.