Actuator, handler apparatus and test apparatus

1. An actuator for adjusting a position of a device under test, comprising:

a fixed section;

first, second, and third rotation axes provided at the fixed section and having axes in a same direction;

first, second, and third rotation sections provided in correspondence to the first, second, and third rotation axes, provided at positions offset from centers of the corresponding rotation axes, and rotating in response to rotation of the corresponding rotation axes;

a movable section including first and third side walls facing the first and the third rotation sections in a first direction on a predetermined movable plane, and a second side wall facing the second rotation section in a second direction different from the first direction, the movable section moving on the movable plane with respect to the fixed section in response to rotation of the first, second, and third rotation sections, and adjusting a position of the device under test; and

a biasing section biasing the movable section with respect to the fixed section in at least one of the first direction and the second direction, and making at least one of the first, second, and third rotation sections abut against the corresponding side wall.

2. The actuator according to claim 1 , wherein

the biasing section biases the movable section with respect to the fixed section in both of the first direction and the second direction, and makes the first, second, and third rotation sections abut against the first, second, and third side walls.

3. The actuator according to claim 2 , wherein

the movable section moves while the first, second, and third side walls abut against the first, second, and third rotation sections.

4. The actuator according to claim 3 , wherein

the biasing section includes:

a spring in a first direction whose one end is connected to the fixed section and the other end is connected to the movable section, the spring in the first direction applying tension force between the fixed section and the movable section in the first direction; and

a spring in a second direction whose one end is connected to the fixed section and the other end is connected to the movable section, the spring in the second direction applying tension force between the fixed section and the movable section in the second direction.

5. The actuator according to claim 1 , wherein

the first direction is orthogonal to the second direction.

6. The actuator according to claim 1 , further comprising:

first, second, and third motors including rotation axes in a direction parallel to the movable plane; and

first, second, and third converting sections provided to correspond to the first, second, and third motors, converting rotation of the corresponding motors to rotation having an axis in a vertical direction with respect to the movable plane, and rotating the first, second, and third rotation axes.

7. A handler apparatus for conveying a device under test to a test socket, comprising:

the actuator according to claim 1 , prior to causing a device holder holding the device under test to fit the test socket, adjusting a position of the device under test on the device holder; and

a conveyer conveying the device holder on which the position of the device under test has been adjusted, to cause the device holder to fit the test socket.

8. The handler apparatus according to claim 7 , further comprising:

an image-capturing section capturing an image of the actuator; and

an actuator adjusting section identifying a center of a rotational operation of the actuator based on an image-capturing result captured by the image-capturing section while rotating the movable section of the actuator on the movable plane.

9. The handler apparatus according to claim 8 , wherein

the actuator includes a mark on a driving portion,

the image-capturing section captures an image of an area including the mark, and

the actuator adjusting section identifies the center of the rotational operation of the actuator based on movement of the mark in response to rotation of the actuator.

10. The handler apparatus according to claim 8 , further comprising

an actuator fitting unit to fit a driving portion of the actuator and including a mark, wherein

the image-capturing section captures an image of an area including the mark, and

the actuator adjusting section identifies the center of the rotational operation of the actuator based on movement of the mark in response to rotation of the actuator.

11. The handler apparatus according to claim 9 , wherein

the actuator adjusting section detects an arc approximating an orbit on which the mark has moved in response to rotation of the actuator, and identifies the center of the arc.

12. The handler apparatus according to claim 8 , wherein

the movable section of the actuator moves according to an instruction to move in a predetermined direction on the movable plane, and

the actuator adjusting section identifies a direction in which the actuator moves according to the instruction, based on the image-capturing result of the image-capturing section when the movable section of the actuator moved according to the instruction.

13. A test apparatus comprising the handler apparatus according to claim 7 for conveying the device under test to a test socket, the test apparatus testing the device under test and further comprising:

a test head to be electrically connected to the device under test via the test socket; and

a test module testing the device under test via the test head.