IP Library Granted Patent US 9,406,880
Granted Patent B2
US 9,406,880 · App. 14/478,408 · Granted Aug 2, 2016

Resistive memory having confined filament formation

Inventors: Eugene P. Marsh (Boise, ID); Jun Liu (Boise, ID)
Assignee: Micron Technology, Inc.
H01L45/1253H01L45/08H01L45/085H01L45/1233H01L45/1246H01L45/1266H01L45/14H01L45/143H01L45/146H01L45/147H01L45/16
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Quick Facts
Patent No.
US 9,406,880
App. No.
14/478,408
Granted
Aug 2, 2016
Kind
B2
Abstract

Resistive memory having confined filament formation is described herein. One or more method embodiments include forming an opening in a stack having a silicon material and an oxide material on the silicon material, and forming an oxide material in the opening adjacent the silicon material, wherein the oxide material formed in the opening confines filament formation in the resistive memory cell to an area enclosed by the oxide material formed in the opening.

Claims (31)

1. A resistive memory cell, comprising:

a vertical stack having a resistive memory material, a silicon material on and directly contacting the resistive memory material, and a first oxide material on the silicon material;

a second oxide material formed on a wall of the silicon material, wherein the second oxide material confines filament formation in the resistive memory cell to an area enclosed by the second oxide material; and

an ion source material in the area enclosed by the second oxide material.

2. The resistive memory cell of claim 1 , wherein:

the silicon material is silicon nitride; and

the second oxide material is copper oxide.

3. The resistive memory cell of claim 1 , wherein:

the silicon material is silicon; and

the second oxide material is silicon dioxide.

4. The resistive memory cell of claim 1 , wherein the second oxide material is an annular shaped oxide material.

5. The resistive memory cell of claim 1 , wherein the second oxide material is an oxidized metal material.

6. A resistive memory cell, comprising:

a vertical stack having an electrode, silicon material on the electrode, and an oxide material on the silicon material;

a metal oxide material on and directly contacting the electrode and formed on and directly contacting a wall of the silicon material, wherein the metal oxide material confines filament formation in the resistive memory cell to an area enclosed by the metal oxide material;

a resistive memory material on the electrode and formed on a wall of the metal oxide material and the oxide material; and

an ion source material formed on a wall of the resistive memory material and in the area enclosed by the metal oxide material.

7. The resistive memory cell of claim 6 , wherein the silicon material is silicon nitride.

8. The resistive memory cell of claim 6 , wherein the resistive memory material is gadolinium oxide.

9. The resistive memory cell of claim 6 , wherein the ion source material is copper telluride.

10. The resistive memory cell of claim 6 , wherein the metal oxide material is an annular shaped metal oxide material.

11. The resistive memory cell of claim 6 , wherein the metal oxide material is a copper oxide material.

12. The resistive memory cell of claim 6 , wherein the oxide material is zirconium dioxide.

13. A resistive memory cell, comprising:

a vertical stack having a resistive memory material, a silicon material on and directly contacting the resistive memory material, and an oxide material on the silicon material;

a silicon dioxide material on the resistive memory material and formed on a wall of the silicon material, wherein the silicon dioxide material confines filament formation in the resistive memory cell to an area enclosed by the silicon dioxide material; and

an ion source material on the resistive memory material and formed on a wall of the silicon dioxide material and the oxide material.

14. The resistive memory cell of claim 13 , wherein the resistive memory material is a resistive random access memory material.

15. The resistive memory cell of claim 13 , wherein the silicon material is silicon.

16. The resistive memory cell of claim 13 , wherein the ion source material is silver sulfide.

17. The resistive memory cell of claim 13 , wherein the silicon dioxide material is an annular shaped silicon dioxide material.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 5, 2014
From: MARSH, EUGENE P.; LIU, JUN
To: MICRON TECHNOLOGY, INC.
Reel/Frame 033678/0276 →
Continuity (2)
Division 13465166 · May 7, 2012
Related Publication 20150021541A1 · Jan 22, 2015