Semiconductor structure with airgap
A field effect transistor (FET) with an underlying airgap and methods of manufacture are disclosed. The method includes forming an amorphous layer at a predetermined depth of a substrate. The method further includes forming an airgap in the substrate under the amorphous layer. The method further includes forming a completely isolated transistor in an active region of the substrate, above the amorphous layer and the airgap.
1. A method, comprising:
forming an amorphous layer at a predetermined depth of a substrate;
forming an airgap in the substrate under the amorphous layer; and
forming a completely isolated transistor in an active region of the substrate, above the amorphous layer and the airgap.
2. The method of claim 1 , wherein the amorphous layer is formed by an ion implantation process, prior to the formation of the transistor.
3. The method of claim 2 , wherein the formation of the amorphous layer comprises:
forming a resist on the substrate;
patterning the resist to form an opening over the active region; and
performing the ion implantation process through the opening, prior to the formation of the transistor and airgap.
4. The method of claim 3 , wherein the formation of the airgap comprises:
etching the substrate with NH 4 OH to form a trench and an undercut extending laterally below the active region; and
filling the trench with a material,
wherein the amorphous layer is an etch stop layer for the etching of the substrate.
5. The method of claim 4 , wherein the material is poly material deposited within the trench.
6. The method of claim 2 , further comprising forming another amorphous layer on a bottom surface of the airgap.
7. The method of claim 2 , further comprising forming a perimeter of amorphous material surrounding the active region of the transistor.
8. The method of claim 2 , wherein the ion implantation process comprises ion implanting species of Ge or Ar.
9. The method of claim 2 , further comprising oxidizing a bottom surface of a lateral undercut to form an amorphous layer on a bottom surface of the airgap opposing the amorphous material.
10. The method of claim 9 , wherein the oxidizing is a thermal growth process.
11. The method of claim 9 , wherein the transistor is bounded by STI structures and the amorphous layer.
12. A method, comprising:
forming at least one deep trench structure in a bulk substrate, on sides of an active region;
forming sidewall structures on sidewalls of the at least one deep trench structure, which acts as an etch stop layer;
forming a lateral undercut in the bulk substrate starting at a bottom of the at least one deep trench structure; and
filling the at least one deep trench structure with material to form an airgap from the lateral undercut in the bulk substrate under the active region,
wherein the lateral undercut is formed by etching with XeF 2 .
13. A structure, comprising:
an amorphous layer under an active region of a substrate;
an airgap in the substrate under the amorphous layer; and
a completely isolated transistor in the active region, above the amorphous layer and the airgap and surrounded by shallow trench isolation regions.
14. The structure of claim 13 , wherein the substrate is bulk silicon.
15. The structure of claim 13 , wherein diffusion regions of the transistor are formed above the amorphous layer and which are abutting the shallow trench isolation regions abutting the amorphous layer.
16. The structure of claim 13 , wherein the amorphous layer is ion implanted substrate material.