IP Library › Granted Patent US 9,590,030
Granted Patent B2
US 9,590,030 · App. 14/487,975 · Granted Mar 7, 2017

Semiconductor device having diode characteristic

Inventor: Mitsuhiko Kitagawa (Tokyo, JP)
Assignee: Kabushiki Kaisha Toshiba
H01L29/0638H01L27/0629H01L27/0814H01L29/063H01L29/0634H01L29/41H01L29/7803H01L29/7804H01L29/7805H01L29/7813H01L29/861H01L29/8611H01L29/2003
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Quick Facts
Patent No.
US 9,590,030
App. No.
14/487,975
Granted
Mar 7, 2017
Kind
B2
Abstract

According to one embodiment, a semiconductor device is provided. The semiconductor device has a first region formed of semiconductor and a second region formed of semiconductor which borders the first region. An electrode is formed to be in ohmic-connection with the first region. A third region is formed to sandwich the first region. A first potential difference is produced between the first and the second regions in a thermal equilibrium state, according to a second potential difference between the third region and the first region.

Claims (22)

1. A semiconductor device, comprising:

a first drift layer of a first conductivity type;

a first contact layer of a second conductivity type which is formed on the first drift layer;

a first electrode in ohmic-connection with the first drift layer; and

a second electrode having a first portion which is adjacent the first drift layer and a first portion of the first contact layer via an insulating film and a second portion which is directly contacting a side surface and an upper surface of a second portion of the first contact layer, the first portion of the first contact layer being between the second portion of the first contact layer and the first electrode.

2. The semiconductor device of claim 1 , further comprising a second contact layer of the first conductivity type between the first drift layer and the second portion of the second electrode, the second contact layer having a concentration of first conductivity type dopants that is greater than a concentration of first conductivity type dopants in the first drift layer.

3. The semiconductor device of claim 2 , wherein the first and second contact layers are provided alternately along an upper surface of the first drift layer.

4. The semiconductor device of claim 1 , further comprising a semiconductor layer of the first conductivity type that is disposed between the first drift layer and the first portion of the second electrode, the semiconductor layer having a concentration of first conductivity type dopants that is greater than a concentration of first conductivity type dopants in the first drift layer.

5. The semiconductor device of claim 1 , wherein the first portion of the second electrode comprises a plurality of trench portions that extend toward first electrode and into the first drift layer such that the first contact layer and a portion the first drift layer are disposed between adjacent trench portions of the second electrode.

6. The semiconductor device of claim 5 , further comprising a second contact layer of the first conductivity type that is between the first drift layer and the second portion of the second electrode, the second contact layer having a concentration of first conductivity type dopants that is greater than a concentration of first conductivity type dopants in the first drift layer.

7. The semiconductor device of claim 6 , wherein the second contact layer has at least a portion that is between the first drift layer and the first contact layer.

8. The semiconductor device of claim 1 , wherein the first conductivity type is n-type and the second conductivity type is p-type.

9. A semiconductor device, comprising:

a first drift layer of a first conductivity type;

a first contact layer of a second conductivity type which is on the first drift layer;

a first electrode in ohmic-connection with the first drift layer; and

a second electrode having a first portion which is contacting the first drift layer and a first portion of the first contact via an insulating film and a second portion which is directly contacting a side surface and a first surface of a second portion of the first contact layer, the first surface of the second portion of the first contact layer not bordering the first contact layer.

10. The semiconductor device of claim 9 , further comprising a second contact layer of the first conductivity type between the first drift layer and the second portion of the second electrode, the second contact layer having a concentration of first conductivity type dopants that is greater than a concentration of first conductivity type dopants in the first drift layer.

11. The semiconductor device of claim 9 , further comprising a semiconductor layer of the first conductivity type between the first drift layer and the first electrode, the semiconductor layer having a concentration of first conductivity type dopants that is greater than a concentration of first conductivity type dopants in the first drift layer.

12. The semiconductor device of claim 9 , wherein the first drift layer is a portion of a superjunction structure disposed between the first and second electrodes.

13. The semiconductor device of claim 9 , wherein the first portion of the second electrode comprises a plurality of embedded trench portions that extend toward the first electrode and into the first drift layer.

14. The semiconductor device of claim 9 , wherein the first conductivity type is n-type and the second conductivity type is p-type.

Priority Claims (2)
JP 2009-284584 · Dec 15, 2009 · national
JP 2010-235063 · Oct 20, 2010 · national
Continuity (2)
Division 12968188 · Dec 14, 2010
Related Publication 20150001668A1 · Jan 1, 2015