IP Library Granted Patent US 9,379,258
Granted Patent B2
US 9,379,258 · App. 14/493,341 · Granted Jun 28, 2016

Fabrication methods for monolithically isled back contact back junction solar cells

Inventors: Pawan Kapur (Burlingame, CA); Anand Deshpande (Cupertino, CA); Virendra V. Rana (Los Gatos, CA); Mehrdad M. Moslehi (Los Altos, CA); Sean M. Seutter (San Jose, CA)
Assignee: Solexel, Inc.
H01L31/022441H01L27/1421H01L31/02167H01L31/02168H01L31/02245H01L31/0516H01L31/0682Y02E10/50
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Quick Facts
Patent No.
US 9,379,258
App. No.
14/493,341
Granted
Jun 28, 2016
Kind
B2
Abstract

Fabrication methods for making back contact back junction solar cells. A base dopant source, a field emitter dopant source, and an emitter dopant source are deposited on the back surface of a solar cell substrate. The solar cell substrate is annealed forming emitter contact regions corresponding to the emitter dopant source, field emitter regions corresponding to the field emitter dopant, and base contact regions corresponding to the base dopant source. The base dopant source, field emitter dopant source, and the emitter dopant source are etched. A backside passivation layer is deposited on the back surface of the solar cell. Contacts are opened to the emitter contact regions and the base contact regions through the backside passivation layer. Patterned base metallization and patterned emitter metallization is formed on the back surface of the solar cell with electrical interconnections to the base contact regions and the emitter contact regions.

Claims (25)

1. A method for making a back contact back junction solar cell, comprising:

printing a first patterned field emitter paste on the back surface of a solar cell substrate, said patterned field emitter paste having a doping polarity opposite said solar cell substrate doping polarity;

printing a second patterned emitter paste on said back surface of said solar cell substrate, said patterned emitter paste having a doping polarity opposite said solar cell substrate;

forming a patterned base paste on said back surface of said solar cell substrate, said patterned base paste having a doping polarity the same as said solar cell substrate doping polarity;

annealing said solar cell substrate, concurrently forming field emitter regions corresponding to said first patterned field emitter paste, emitter contact regions corresponding to said second patterned emitter paste, and base contact regions corresponding to said patterned base paste;

etching said first patterned field emitter paste, said second patterned emitter paste, and said patterned base paste;

depositing a backside passivation layer on said back surface of said solar cell;

opening contacts to said emitter contact regions and said base contact regions through said backside passivation layer; and

forming patterned base metallization and patterned emitter metallization making electrical interconnections to said base contact regions and said emitter contact regions.

2. The method for forming a back contact back junction solar cell of claim 1 , wherein said first patterned field emitter paste, said second patterned emitter paste, and said base paste are silicon nanoparticle pastes.

3. The method for forming a back contact back junction solar cell of claim 1 , wherein said backside passivation layer is aluminum oxide.

4. A method for making a back contact back junction solar cell, comprising;

printing a patterned emitter contact paste on a back surface of a solar cell substrate, said patterned emitter contact paste having a doping polarity opposite said solar cell substrate doping polarity;

forming a patterned base contact paste on said back surface of said solar cell substrate, said patterned base contact paste having a doping polarity the same as said solar cell substrate doping polarity;

depositing a field emitter doped oxide covering said back surface of said solar cell substrate, said patterned emitter paste, and said patterned base paste, said field emitter doped oxide having a doping polarity opposite said solar cell substrate doping polarity;

annealing said solar cell substrate concurrently forming field emitter regions corresponding to said field emitter doped oxide, emitter contact regions corresponding to said patterned emitter paste, and base contact regions corresponding to said patterned base paste;

etching said field emitter doped oxide, said patterned emitter contact paste, and said patterned base contact paste;

depositing a backside passivation layer on said back surface of said solar cell;

opening contacts to said emitter contact regions and said base contact regions through said backside passivation layer; and

forming patterned base metallization and patterned emitter metallization with electrical interconnections to said base contact regions and said emitter contact regions.

5. The method for forming a back contact back junction solar cell of claim 4 , wherein said emitter contact paste and said base contact paste are silicon nanoparticle pastes.

6. The method for forming a back contact back junction solar cell of claim 4 , wherein said field emitter doped oxide is deposited using an APCVD process.

7. The method for forming a back contact back junction solar cell of claim 4 , wherein said field emitter doped oxide comprises aluminum oxide.

8. The method for forming a back contact back junction solar cell of claim 4 , wherein said field emitter doped oxide comprises boron-doped silicon oxide.

9. The method for forming a back contact back junction solar cell of claim 4 , wherein said backside passivation layer is aluminum oxide.

Assignments (7)
ASSIGNMENT OF LOAN DOCUMENTS Recorded Sep 29, 2017
From: OPUS BANK
To: OB REALTY, LLC
Reel/Frame 044062/0383 →
CHANGE OF NAME Recorded Jul 28, 2017
From: SOLEXEL, INC.
To: BEAMREACH SOLAR, INC.
Reel/Frame 043367/0649 →
RECORDATION OF FORECLOSURE OF PATENT PROPERTIES Recorded Jul 27, 2017
From: OB REALTY, LLC
To: OB REALTY, LLC
Reel/Frame 043350/0822 →
CHANGE OF NAME Recorded Jul 26, 2017
From: SOLEXEL, INC.
To: BEAMREACH SOLAR, INC.
Reel/Frame 043342/0439 →
SECURITY INTEREST Recorded Jan 7, 2015
From: SOLEXEL, INC.
To: OPUS BANK
Reel/Frame 034731/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 22, 2014
From: KAPUR, PAWAN; DESHPANDE, ANAND; RANA, VIRENDRA V.; MOSLEHI, MEHRDAD M.; SEUTTER, SEAN M.
To: SOLEXEL, INC.
Reel/Frame 034571/0273 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 20, 2014
From: KAPUR, PAWAN
To: SOLEXEL, INC.
Reel/Frame 033986/0991 →
Continuity (7)
Continuation In Part 14179526 · Feb 12, 2014
Continuation In Part 14072759 · Nov 5, 2013
Provisional Application 61880777 · Sep 20, 2013
Provisional Application 61763580 · Feb 12, 2013
Provisional Application 61859602 · Jul 29, 2013
Provisional Application 61722620 · Nov 5, 2012
Related Publication 20150171240A1 · Jun 18, 2015