Method of fabricating graphene nano device

1. A method of fabricating a graphene nano device, comprising:

forming a first metal mask pattern on a substrate on which a graphene layer is formed; and

forming a graphene pattern by performing an etching process on the graphene layer using the first metal mask pattern as an etching mask,

wherein the forming of the first metal mask pattern comprises:

forming a first adhesive layer on the graphene layer;

disposing the first metal mask pattern prepared in advance on the first adhesive layer; and

heating the first adhesive layer to attach the first metal mask pattern on the substrate.

2. The method of fabricating a graphene nano device of claim 1 , further comprising:

forming a first membrane mask pattern on the graphene pattern; and

performing an etching process on the grapheme pattern using the first membrane mask pattern as an etching mask to form a micro graphene pattern.

3. The method of fabricating a graphene nano device of claim 2 , wherein the forming of the first membrane mask pattern comprises:

forming a second adhesive layer on the graphene pattern;

disposing the first membrane mask pattern prepared in advance on the second adhesive layer; and

heating the second adhesive layer to attach the first membrane mask pattern on the substrate.

4. The method of fabricating a graphene nano device of claim 2 , wherein the first membrane mask pattern comprises a first opening defined by an inner wall of the first membrane mask pattern, and the first opening exposes a portion of the graphene pattern.

5. The method of fabricating a graphene nano device of claim 4 , wherein the first membrane mask pattern comprises a body part and a membrane part extended from an inner wall of the body part, and at least a portion of the first opening is defined by a side wall of the membrane part.

6. The method of fabricating a graphene nano device of claim 5 , wherein a thickness of the membrane part is smaller than a thickness of the body part.

7. The method of fabricating a graphene nano device of claim 2 , wherein the first membrane mask pattern comprises at least one of a silicon oxide layer, a silicon nitride layer and a silicon oxynitride layer.

8. The method of fabricating a graphene nano device of claim 1 , wherein a portion of the substrate is exposed by the etching process,

the method further comprising forming a metal electrode pattern on the exposed substrate,

wherein the forming of the metal mask pattern on the substrate comprises:

forming a second metal mask pattern on the substrate;

depositing a metal layer on the substrate on which the second metal mask pattern is formed; and

removing the second metal mask pattern after depositing the metal layer.

9. The method of fabricating a graphene nano device of claim 8 , wherein the forming of the second metal mask pattern comprises:

forming a third adhesive layer on the graphene pattern;

disposing the second metal mask pattern prepared in advance on the third adhesive layer; and

heating the third adhesive layer to attach the second metal mask pattern on the substrate.

10. The method of fabricating a graphene nano device of claim 1 , wherein a portion of the substrate is exposed by the etching process,

the method further comprising forming a micro metal electrode pattern on the exposed substrate,

wherein the forming of the micro metal electrode pattern comprises:

forming a second membrane mask pattern on the substrate;

depositing a metal layer on the substrate on which the second membrane mask pattern is formed; and

removing the second membrane mask pattern after depositing the metal layer.

11. The method of fabricating a graphene nano device of claim 1 , further comprising separating the first metal mask pattern from the substrate after forming the graphene pattern,

wherein the first metal mask pattern is separated from the substrate by removing the first adhesive layer using an organic solvent.