Gas sensor device with frame passageways and related methods
A gas sensor device may include a gas sensor integrated circuit (IC) having a gas sensing surface, and bond pads adjacent to the gas sensing surface, and a frame having gas passageways extending therethrough adjacent the gas sensing surface. The gas sensor device may include leads, each having a proximal end spaced from the frame and bonded to a respective bond pad, and a distal end extending downwardly from the proximal end, and encapsulation material filling the space between the proximal ends of the leads and the frame.
1. A gas sensor device comprising:
a gas sensor integrated circuit (IC) having a gas sensing surface, and a plurality of bond pads adjacent thereto;
a frame having a plurality of gas passageways extending therethrough adjacent the gas sensing surface;
a plurality of lead frame bodies, each lead frame body being devoid of a bond wire and having
a proximal end spaced from said frame, said proximal end being over and bonded to a respective bond pad, and
a distal end extending downwardly from the proximal end; and
encapsulation material filling a space between the proximal ends of said plurality of lead frame bodies and said frame;
said frame, said encapsulation material, and the proximal ends of said plurality of lead frame bodies being adjacent to define an upper surface of the gas sensor device;
the proximal ends of said plurality of lead frame bodies being exposed at the upper surface of the gas sensor device.
2. The gas sensor device of claim 1 wherein said frame and the gas sensing surface are in spaced relation to define a gas sensing cavity therebetween.
3. The gas sensor device of claim 1 wherein said gas sensor IC has a backside surface opposite the gas sensing surface; and wherein the distal ends of said plurality of lead frame bodies extend past the backside surface to define a recess.
4. The gas sensor device of claim 1 further comprising an adhesive layer between said gas sensor IC and said plurality of lead frame bodies.
5. The gas sensor device of claim 1 further comprising additional encapsulation material adjacent said plurality of lead frame bodies to define a sidewall of the gas sensor device.
6. The gas sensor device of claim 1 wherein said frame is rectangle-shaped.
7. The gas sensor device of claim 1 wherein each gas passageway is cylinder-shaped.
8. The gas sensor device of claim 1 wherein said plurality of lead frame bodies and said plurality of bond pads each comprises at least one of copper and aluminum.
9. The gas sensor device of claim 1 wherein said encapsulation material comprises a dielectric material.
10. A gas sensor device comprising:
a gas sensor integrated circuit (IC) having a gas sensing surface, and a plurality of bond pads adjacent thereto;
a frame having a plurality of gas passageways extending therethrough adjacent the gas sensing surface, said frame and the gas sensing surface being in spaced relation to define a gas sensing cavity therebetween;
a plurality of lead frame bodies, each lead frame body being devoid of a bond wire and having
a proximal end spaced from said frame, said proximal end being over and bonded to a respective bond pad, and
a distal end extending downwardly from the proximal end;
an adhesive layer between said gas sensor IC and said plurality of lead frame bodies; and
encapsulation material filling a space between the proximal ends of said plurality of lead frame bodies and said frame;
said frame, said encapsulation material, and the proximal ends of said plurality of lead frame bodies being aligned to define an upper surface of the gas sensor device;
the proximal ends of said plurality of lead frame bodies being exposed at the upper surface of the gas sensor device.
11. The gas sensor device of claim 10 wherein said gas sensor IC has a backside surface opposite the gas sensing surface; and wherein the distal ends of said plurality of lead frame bodies extend past the backside surface to define a recess.
12. The gas sensor device of claim 10 further comprising additional encapsulation material adjacent said plurality of lead frame bodies to define a sidewall of the gas sensor device.
13. The gas sensor device of claim 10 wherein said frame is rectangle-shaped.
14. The gas sensor device of claim 10 wherein each gas passageway is cylinder-shaped.
15. A method of making a gas sensor device comprising:
forming a frame having a plurality of gas passageways extending therethrough, and forming a plurality of lead frame bodies, each lead frame body being devoid of a bond wire and having
a proximal end spaced from the frame, and
a distal end extending downwardly from the proximal end;
positioning a gas sensor integrated circuit (IC) having a gas sensing surface adjacent the plurality of gas passageways, and a plurality of bond pads adjacent thereto and bonded to a respective proximal end, the respective proximal end being over a respective bond pad; and
forming encapsulation material to fill a space between the proximal ends of the plurality of lead frame bodies and the frame;
said frame, the encapsulation material, and the proximal ends of the plurality of lead frame bodies being adjacent to define an upper surface of the gas sensor device;
the proximal ends of the plurality of lead frame bodies being exposed at the upper surface of the gas sensor device.
16. The method of claim 15 wherein the frame and the gas sensing surface are in spaced relation to define a gas sensing cavity therebetween.
17. The method of claim 15 wherein the gas sensor IC has a backside surface opposite the gas sensing surface; and wherein the distal ends of the plurality of lead frame bodies extend past the backside surface to define a recess.
18. The method of claim 15 further comprising forming an adhesive layer between the gas sensor IC and the plurality of lead frame bodies.
19. The method of claim 15 further comprising forming additional encapsulation material adjacent the plurality of lead frame bodies to define a sidewall of the gas sensor device.
20. The method of claim 15 wherein the frame is rectangle-shaped.
21. The method of claim 15 wherein each gas passageway is cylinder-shaped.
22. The method of claim 15 wherein the plurality of lead frame bodies and the plurality of bond pads each comprises at least one of copper and aluminum.
23. The method of claim 15 wherein the encapsulation material comprises a dielectric material.