IP Library Granted Patent US 9,425,390
Granted Patent B2
US 9,425,390 · App. 14/515,998 · Granted Aug 23, 2016

Select device for memory cell applications

Inventors: David H. Wells (Boise, ID); Christopher D. Cardon (Boise, ID); Caner Onal (San Jose, CA)
Assignee: Micron Technology, Inc.
H01L45/1253G11C13/0021H01L45/06H01L45/1233H01L45/16
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Quick Facts
Patent No.
US 9,425,390
App. No.
14/515,998
Granted
Aug 23, 2016
Kind
B2
Abstract

The present disclosure includes select devices and methods of using select device for memory cell applications. An example select device includes a first electrode having a particular geometry, a semiconductor material formed on the first electrode and a second electrode having the particular geometry with formed on the semiconductor material, wherein the select device is configured to snap between resistive states in response to signals that are applied to the select device.

Claims (28)

1. A memory cell, comprising:

a select device including:

a first electrode having a particular geometry;

a semiconductor material formed on the first electrode;

a second electrode having the particular geometry formed on the semiconductor material, wherein the select device is configured to snap between resistive states in response to signals that are applied to the select device; and

an insulator material is formed on a sidewall of the first electrode, a sidewall of the semiconductor material, and a sidewall of the second electrode.

2. The memory cell of claim 1 , wherein the semiconductor is amorphous silicon.

3. The memory cell of claim 1 , wherein the select device includes a leakage current that scales with the area of the select device.

4. The memory cell of claim 1 , wherein a width of the semiconductor material is less than approximately 20 nanometers.

5. The memory cell of claim 1 , wherein an aspect ratio of the first electrode is greater than 10.

6. The memory cell of claim 1 , wherein the first electrode and the second electrode include titanium silicon nitride (TiSiN).

7. The memory cell of claim 1 , wherein the first electrode and the second electrode include tantalum nitride (TaN).

8. The memory cell of claim 1 , wherein the first electrode and the second electrode include optical adsorbers.

9. A memory cell, comprising:

a select device including:

a first electrode having a particular geometry;

a semiconductor material formed on the first electrode;

a second electrode having the particular geometry formed on the semiconductor material; and

an insulator material formed on a sidewall of the first electrode, a sidewall of the semiconductor material, and a sidewall of the second electrode.

10. The memory cell of claim 9 , wherein the semiconductor material is doped with carbon.

11. The memory cell of claim 9 , wherein the first electrode and the second electrode is doped with carbon.

12. The memory cell of claim 9 , wherein first electrode and the second electrode are formed of a metal/resistor laminate.

13. The memory cell of claim 9 , wherein the insulator material is silicon nitride.

14. The memory cell of claim 9 , wherein the insulator material has a dielectric constant that is greater than 10.

15. The memory cell of claim 9 , wherein the particular geometry is a circular geometry with a diameter of less than 20 nanometers.

16. The memory cell of claim 9 , including a resistive storage element in series with the select device.

17. The memory cell of claim 9 , wherein a half select ratio (HSR) of the resistive storage element is greater than 10 4 .

18. The memory cell of claim 9 , wherein the select device is supports bi-directional current flow therethrough.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 16, 2014
From: WELLS, DAVID H.; CARDON, CHRISTOPHER D.; ONAL, CANER
To: MICRON TECHNOLOGY, INC.
Reel/Frame 033964/0313 →
Continuity (1)
Related Publication 20160111639A1 · Apr 21, 2016