Structure and formation method of damascene structure
View Patent ↗A structure and a formation method of a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and a first conductive feature over the semiconductor substrate. The semiconductor device also includes a first dielectric layer over the semiconductor substrate and surrounding the first conductive feature. The semiconductor device further includes a second conductive feature over the first conductive feature, and the second conductive feature extends into the first conductive feature. In addition, the semiconductor device includes a second dielectric layer over the first dielectric layer and surrounding the second conductive feature.
1. A semiconductor device, comprising:
a semiconductor substrate;
a first conductive feature over the semiconductor substrate;
a first dielectric layer over the semiconductor substrate and surrounding the first conductive feature;
a second conductive feature over the first conductive feature, wherein the second conductive feature extends into the first conductive feature;
a second dielectric layer over the first dielectric layer and surrounding the second conductive feature;
an etch stop layer between the first dielectric layer and the second dielectric layer, wherein the etch stop layer surrounds the first conductive feature; and
an intermediate dielectric layer between the etch stop layer and the second dielectric layer, wherein the intermediate dielectric layer surrounds the first conductive feature and the second conductive feature.
2. The semiconductor device as claimed in claim 1 , wherein the first conductive feature and the second conductive feature are made of different materials.
3. The semiconductor device as claimed in claim 1 , wherein the second conductive feature comprises cobalt.
4. The semiconductor device as claimed in claim 1 , wherein:
the second conductive feature has a bottom surface,
the first conductive feature has a top surface and a bottom surface, and
the bottom surface of the second conductive feature is between the top surface and the bottom surface of the first conductive feature.
5. The semiconductor device as claimed in claim 1 , wherein the first conductive feature is in direct contact with the second conductive feature such that no barrier layer that is made of a material different from the first conductive feature and the second conductive feature is between the first conductive feature and the second conductive feature.
6. The semiconductor device as claimed in claim 1 , further comprising:
a third conductive feature over the second conductive feature; and
a third dielectric layer over the second dielectric layer and surrounding the third conductive feature.
7. The semiconductor device as claimed in claim 6 , wherein the second conductive feature extends into the third conductive feature.
8. The semiconductor device as claimed in claim 7 , further comprising a barrier layer between the second conductive feature and the third conductive feature.
9. The semiconductor device as claimed in claim 1 , wherein the first conductive feature is a conductive line, and the second conductive feature is a conductive via.
10. The semiconductor device as claimed in claim 1 , wherein the second conductive feature protrudes above the second dielectric layer.
11. A semiconductor device, comprising:
a semiconductor substrate;
a first conductive feature over the semiconductor substrate, wherein the first conductive feature has a recess;
a first dielectric layer over the semiconductor substrate and surrounding the first conductive feature;
a second conductive feature over the first conductive feature, wherein a portion of the second conductive feature is in the recess of the first conductive feature; and
a second dielectric layer over the first dielectric layer and surrounding the second conductive feature;
an etch stop layer between the first dielectric layer and the second dielectric layer, wherein the etch stop layer surrounds the first conductive feature; and
an intermediate dielectric layer between the etch stop layer and the second dielectric layer, wherein the intermediate dielectric layer surrounds the first conductive feature and the second conductive feature.
12. The semiconductor device as claimed in claim 11 , wherein the first conductive feature comprises copper, and the second conductive feature comprises cobalt.
13. The semiconductor device as claimed in claim 11 , further comprising:
a third conductive feature over the second conductive feature, wherein the second conductive feature extends into the third conductive feature; and
a third dielectric layer over the second dielectric layer and surrounding the third conductive feature.
14. The semiconductor device as claimed in claim 11 , further comprising a barrier layer between the third conductive feature and the third dielectric layer, wherein the barrier layer is also between the third conductive feature and the second conductive feature.
15. A method for forming a semiconductor device, comprising:
forming a first dielectric layer over a semiconductor substrate;
forming an etch stop layer over the first dielectric layer;
forming an intermediate dielectric layer over the etch stop layer;
forming a first conductive feature in the first dielectric layer after the formation of the intermediate dielectric layer;
forming a second dielectric layer over the intermediate dielectric layer;
forming a hole in the second dielectric layer to expose the first conductive feature;
partially removing the first conductive feature to form a recess; and
forming a second conductive feature in the hole and the recess.
16. The method for forming a semiconductor device as claimed in claim 15 , further comprising forming a barrier region in the second dielectric layer, wherein the barrier region surrounds the hole.
17. The method for forming a semiconductor device as claimed in claim 15 , further comprising:
forming a third dielectric layer over the second dielectric layer;
forming an opening in the third dielectric layer to expose the second conductive feature, wherein the opening exposes a top surface and a sidewall of the second conductive feature; and
forming a third conductive feature in the opening.
18. The method for forming a semiconductor device as claimed in claim 17 , further comprising forming a barrier layer over sidewalls of the opening and the second conductive feature before the third conductive feature is formed.
19. The semiconductor device as claimed in claim 1 , further comprising a barrier region surrounding and being in direct contact with the second conductive feature, wherein the barrier region is a doped region formed in the second dielectric layer.
20. The semiconductor device as claimed in claim 1 , wherein a bottom of the second conductive feature is between a top of the etch stop layer and a top of the intermediate dielectric layer.