IP Library Granted Patent US 9,816,852
Granted Patent B2
US 9,816,852 · App. 14/525,155 · Granted Nov 14, 2017

System for weighing individual micro- and nano-sized particles

Inventors: Cagri Abdullah Savran (West Lafayette, IN); Bin-Da Chan (West Lafayette, IN); Kutay Icoz (Kayseri, TR)
Assignee: Purdue Research Foundation
G01G3/165G01G3/16
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,816,852
App. No.
14/525,155
Granted
Nov 14, 2017
Kind
B2
Abstract

A device for weighing micro- and nano-sized particles. The device includes a base portion, an oscillator coupled to the base portion and configured to vibrate the base portion, a first cantilevered beam coupled to the base portion, a second cantilevered beam coupled to the base portion, a first plurality of fingers coupled to the first cantilevered beam near the tip inwardly pointing toward the second cantilevered beam, and a second plurality of fingers coupled to the second cantilevered beam near the tip inwardly pointing toward the first cantilevered beam.

Claims (41)

1. A device for weighing micro- and nano-sized particles, comprising:

a base portion;

an oscillator coupled to the base portion configured to vibrate the base portion;

a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end;

a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end;

each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, respectively, such that the entirety of each cantilever beam is positioned in a side-by-side manner next to the entirety of the other;

the first plurality of fingers interdigitating with the second plurality of fingers such that the first cantilevered beam and the second cantilevered beam can oscillate independent of each other, and

where the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern.

2. The device of claim 1 , the tip of the first cantilevered beam includes a first retaining feature configured to maintain position of a particle placed thereon for weighing.

3. The device of claim 2 , the tip of the second cantilevered beam includes a second retaining feature configured to maintain position of a reference weight placed thereon for weighing the particle.

4. The device of claim 1 , the first and second cantilevered beams are silicon-based.

5. The device of claim 1 , each cantilevered beam has a length of between about 50 μm to 500 μm and a width outside of the tip portion of each of the first and second cantilever beams of between about 10 μm to 100 μm.

6. The device of claim 5 , the tip portion of each of the first and second cantilever beams has a width of between about 10 μm to 100 μm.

7. The device of claim 6 , each of the fingers has a width of between about 2 to 5 μm and a length of between about 10 μm to 100 μm and the gap is between about 1 μm to 5 μm.

8. A system for weighting micro- and nano sized particles, comprising:

a resonator, the resonator comprising:

a base portion,

an oscillator configured to provide mechanical vibration according to a selective sweep of frequencies to the base portion;

a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end,

a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end,

each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, respectively, such that the entirety of each cantilever beam is positioned in a side-by-side manner next to the entirety of the other, and

where the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern;

a light source positioned proximate to the resonator and configured to shine light on the interdigitating fingers; and

at least one optical detector positioned proximate to the resonator to measure light intensity of at least one of the modes of the diffraction pattern.

9. The system of claim 8 , the at least one mode is the 0 th mode.

10. The system of claim 8 , the light source is a laser.

11. The system of claim 8 , the tip of the first cantilevered beam includes a first retaining feature configured to maintain position of a particle placed thereon for weighing.

12. The system of claim 11 , the tip of the second cantilevered beam includes a second retaining feature configured to maintain position of a reference weight placed thereon for weighing the particle.

13. The system of claim 8 , the first and second cantilevered beams are silicon-based.

14. The device of claim 1 , wherein the first and second cantilever beams are configured to provide a relative weight difference measurement generating a measurement of differences of mass between two weights each placed on a corresponding cantilever beam.

15. The system of claim 8 , wherein the first and second cantilever beams are configured to provide a relative weight difference measurement generating a measurement of differences of mass between two weights each placed on a corresponding cantilever beam.

16. A device for weighing micro- and nano-sized particles, comprising:

a base portion;

an oscillator coupled to the base portion configured to vibrate the base portion;

a first cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end;

a second cantilevered beam coupled to the base portion at a proximal end and having a tip portion at a distal end;

each of the first and second cantilever beams further having a first plurality of fingers near the first tip portion inwardly pointing and a second plurality of fingers near the second tip portion inwardly pointing, such that the entirety of each cantilever beam is sized and shaped substantially the same as the other and whereby the first and second cantilever beams positioned to allow the first plurality of fingers interdigitating with the second plurality of fingers such that the first cantilevered beam and the second cantilevered beam can oscillate independent of each other, and

where the interdigitating fingers separated by gaps that are configured to reflect light from the interdigitating fingers during oscillation of the first and second cantilevered beams to form a diffraction pattern, wherein the first and second cantilever beams are configured to provide a relative weight difference measurement generating a measurement of differences of mass between two weights each placed on a corresponding cantilever beam.

17. The device of claim 16 , the tip of the first cantilevered beam includes a first retaining feature configured to maintain position of a particle placed thereon for weighing.

18. The device of claim 17 , the tip of the second cantilevered beam includes a second retaining feature configured to maintain position of a reference weight placed thereon for weighing the particle.

19. The device of claim 16 , the first and second cantilevered beams are silicon-based.

Assignments (2)
CONFIRMATORY LICENSE Recorded Apr 7, 2015
From: PURDUE UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035386/0282 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 15, 2014
From: SAVRAN, CAGRI A.; CHAN, BIN-DA; ICOZ, KUTAY
To: PURDUE RESEARCH FOUNDATION
Reel/Frame 034505/0908 →
Continuity (2)
Provisional Application 61895734 · Oct 25, 2013
Related Publication 20150068309A1 · Mar 12, 2015