Ion generator and ion generating method
View Patent ↗An ion generator is provided with: an arc chamber that is at least partially made up of a material containing carbon; a thermal electron emitter that emits thermal electrons into the arc chamber; and a gas introducer that introduces a source gas and a compound gas into the arc chamber. The source gas to be introduced into the arc chamber contains a halide gas, and the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms.
1. An ion generator comprising:
an arc chamber that is at least partially made up of a material containing carbon;
a thermal electron emitter configured to emit thermal electrons into the arc chamber; and
a gas introducer configured to introduce a source gas and a compound gas into the arc chamber, wherein
the source gas to be introduced into the arc chamber contains a halide gas,
the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms, and
the compound gas is hydrocarbon.
2. The ion generator according to claim 1 , wherein the hydrocarbon is at least one sort of gases selected from the group consisting of CH 4 , C 2 H 6 , C 3 H 8 and C 4 H 10 .
3. The ion generator according to claim 1 , wherein the source gas contains a fluoride gas.
4. The ion generator according to claim 3 , wherein the fluoride gas is at least one sort of gases selected from the group consisting of BF 3 , GeF 4 and PF 3 .
5. The ion generator according to claim 1 , wherein the source gas is at least one sort of gases selected from the group consisting of a chloride gas, an iodide gas and a bromide gas.
6. The ion generator according to claim 1 , wherein an inner wall surface of the arc chamber, excluding a filament and a cathode, is made up of carbon.
7. An ion generating method comprising:
introducing a source gas and a compound gas into an arc chamber that is at least partially made up of a material containing carbon;
emitting thermal electrons into the arc chamber;
generating a plasma by collision between the source gas and the thermal electrons; and
extracting ions from the plasma to the outside, wherein
the source gas to be introduced into the arc chamber contains a halide gas,
the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms, and
the compound gas is a hydrocarbon.
8. The ion generating method according to claim 7 , wherein a temperature in the arc chamber is not lower than 600° C. in the generation step.
9. The ion generating method according to claim 7 , wherein the hydrocarbon is at least one sort of gases selected from the group consisting of CH 4 , C 2 H 6 , C 3 H 8 and C 4 H 10 .
10. The ion generating method according to claim 7 , wherein the source gas contains a fluoride gas.
11. The ion generating method according to claim 10 , wherein the fluoride gas is at least one sort of gases selected from the group consisting of BF 3 , GeF 4 and PF 3 .
12. The ion generating method according to claim 7 , wherein the introduction step introduces a noble gas in addition to the source gas and the compound gas.
13. The ion generating method according to claim 7 , further comprising exhausting halogen element contained in the halide gas as a hydrogen halide.