Cold cathode ionization vacuum gauge
View Patent ↗A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
1. A method of operating a cold cathode ionization vacuum gauge comprising:
setting a voltage potential difference to form an electrical discharge between an anode electrode and a cold cathode electrode, the cold cathode electrode collecting ions resulting from the electrical discharge;
measuring a discharge current between the anode electrode and the cold cathode electrode, and deriving a pressure reading therefrom;
recording the discharge current as a function of time; and
integrating the discharge current over time to obtain a dose measurement distinct from the pressure reading as a measure of effective lifetime of the vacuum gauge.
2. The method of claim 1 , further including recording and integrating a gas factor as a function of time.
3. The method of claim 2 , further including recording and integrating an ion energy factor indicative of energy of ions reaching the cold cathode electrode as a function of time.
4. The method of claim 1 , further including determining a remaining service life for the vacuum gauge based on the dose measurement.
5. The method of claim 1 , further including recording and integrating an ion energy factor indicative of energy of ions reaching the cold cathode electrode as a function of time.
6. The method of claim 1 further comprising applying a voltage to the anode electrode through a limiting resistor, determining impedance between the anode electrode and the cold cathode electrode from the voltage applied to the anode and the discharge current, and deriving the pressure reading from the determined impedance.
7. The method of claim 6 further including recording and integrating a gas factor as a function of time.
8. The method of claim 7 further including recording and integrating an ion energy factor indicative of energy of ions reaching the cold cathode electrode as a function of time.
9. The method of claim 6 further including determining a remaining service life for the vacuum gauge based on the dose measurement.
10. The method of claim 6 further including recording and integrating an ion energy factor indicative of energy of ions reaching the cold cathode electrode as a function of time.