Tri-modal carrier for a semiconductive wafer
A tri-modal carrier provides a structural platform to temporarily bond a semiconductive wafer and can be used to transport the semiconductive wafer or be used to perform manufacturing processes on the semiconductive wafer. The tri-modal carrier includes a doped semiconductive substrate, a plurality of electrostatic field generating (EFG) circuits, and a capacitance charging interface. A positive pole and a negative pole from each EFG circuit are embedded into the doped semiconductive substrate. An exposed portion of the doped semiconductive substrate is located between the positive pole and the negative pole, which is used as a biased pole for each EFG circuit. The combination of these poles for each EFG circuit is used to generate a non-uniform electrostatic field for bonding the semiconductive wafer. The tri-modal carrier also uses flat surface properties and the removal of trapped gas particles to strengthen the bond between the tri-modal carrier and the semiconductive wafer.
1. A tri-modal carrier for a semiconductive wafer comprises:
a doped semiconductive substrate;
a plurality of electrostatic field generating (EFG) circuits;
a capacitance charging interface;
said semiconductive substrate comprises a first face and a second face;
each of said plurality of EFG circuits comprises a positive pole, a negative pole, and a biased pole;
said plurality of EFG circuits being distributed across said doped semiconductive substrate;
said positive pole and said negative pole being embedded into said doped semiconductive substrate from said first face;
said positive pole and said negative pole being offset from each other across said first face;
an exposed portion of said doped semiconductive substrate being located between said positive pole and said negative pole for each of said plurality of EFG circuits;
said biased pole being said exposed portion of said doped semiconductive substrate; and
said capacitance charging interface being electrically connected to said positive pole, said negative pole, and said biased pole.
2. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 comprises:
said capacitance charging interface comprises at least one positive terminal;
said at least one positive terminal being electrically connected to said positive poles of said plurality of EFG circuits; and
said at least one positive terminal being mounted onto said second face.
3. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 comprises:
said capacitance charging interface comprises at least one negative terminal;
said at least one negative terminal being electrically connected to said negative poles from said plurality of EFG circuits; and
said at least one negative terminal being mounted onto said second face.
4. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 comprises:
said capacitance charging interface comprises at least one biasing terminal;
said at least one biasing terminal being electrically connected to said biased poles from said plurality of EFG circuits; and
said at least one biasing terminal being mounted onto said second face.
5. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 comprises:
said positive pole and said negative pole being flush with said exposed portions of said doped semiconductor substrate; and
a planarized surface being formed by said positive poles and said negative poles of said plurality of EFG circuits and said exposed portions of said doped semiconductor substrate.
6. The tri-modal carrier for a semiconductive wafer as claimed in claim 5 comprises:
a polishing film; and
said polishing film being superimposed upon said planarized surface.
7. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 comprises:
an insulative film; and
said insulative film being positioned between said positive pole and said doped semiconductive substrate.
8. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 comprises:
an insulative film; and
said insulative film being positioned between said negative pole and said doped semiconductive substrate.
9. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 , where said doped semiconductive substrate is made of a p-type semiconductor material.
10. The tri-modal carrier for a semiconductive wafer as claimed in claim 1 , where said doped semiconductive substrate is made of an n-type semiconductor material.