Gap-fill methods
View Patent ↗Provided are gap-fill methods. The methods comprise: (a) providing a semiconductor substrate having a relief image on a surface of the substrate, the relief image comprising a plurality of gaps to be filled; (b) applying a gap-fill composition over the relief image, wherein the gap-fill composition comprises a self-crosslinkable polymer and a solvent, wherein the self-crosslinkable polymer comprises a first unit comprising a polymerized backbone and a crosslinkable group pendant to the backbone; and (c) heating the gap-fill composition at a temperature to cause the polymer to self-crosslink. The methods find particular applicability in the manufacture of semiconductor devices for the filling of high aspect ratio gaps.
1. A gap-fill method, comprising:
(a) providing a semiconductor substrate having a relief image on a surface of the substrate, the relief image comprising a plurality of gaps to be filled;
(b) applying a gap-fill composition over the relief image, wherein the gap-fill composition comprises a self-crosslinkable polymer and a solvent, wherein the self-crosslinkable polymer comprises a first unit comprising a polymerized backbone and a crosslinkable group pendant to the backbone; and
(c) heating the gap-fill composition at a temperature to cause the polymer to self-crosslink.
2. The method of claim 1 , wherein the crosslinkable group is an arylcyclobutene.
3. The method of claim 1 , wherein the polymer further comprises a second unit chosen from general formulae (IV) and (V):
wherein R 11 is independently chosen from hydrogen, fluorine, C 1 -C 3 alkyl and C 1 -C 3 fluoroalkyl, R 12 is chosen from optionally substituted C 1 to C 10 alkyl, and Ar 3 is an aryl group.
4. The method of claim 2 , wherein the first unit and the second unit are
respectively.
5. The method of claim 1 , wherein the self-crosslinkable polymer has a weight average molecular weight of less than 50,000 and a polydispersity index of less than 1.5.
6. The method of claim 1 , wherein the gap-fill composition is free of additive crosslinking agents.
7. The method of claim 1 , wherein the gaps have a width of less than 50 nm and an aspect ratio of 2 or more.
8. The method of claim 1 , further comprising prior to causing the gap fill composition to self-crosslink, heating the gap-fill composition at a temperature to cause the gap-fill composition to fill the plurality of gaps.
9. The method of claim 8 , wherein the temperature to cause the gap-fill composition to fill the plurality of gaps is at least 15° C. lower than the temperature to cause the polymer to self-crosslink.
10. The method of claim 8 , wherein the heating to fill the plurality of gaps and the heating to self-crosslink are conducted in a single process.