Method of forming anneal-resistant embedded resistor for non-volatile memory application
View Patent ↗Embodiments of the invention include a nonvolatile memory device that contains nonvolatile resistive random access memory device with improved device performance and lifetime. In some embodiments, nonvolatile resistive random access memory device includes a diode, a metal silicon nitride embedded resistor, and a resistive switching layer disposed between a first electrode layer and a second electrode layer. In some embodiments, the method of forming a resistive random access memory device includes forming a diode, forming a metal silicon nitride embedded resistor, forming a first electrode layer, forming a second electrode layer, and forming a resistive switching layer disposed between the first electrode layer and the second electrode layer.
1. A stack comprising:
a first electrode;
a resistive switching layer;
an embedded resistor, such that the resistive switching layer is disposed between the first electrode and the embedded resistor,
wherein the embedded resistor comprises a metal, silicon, and nitrogen,
wherein the embedded resistor has a substantially amorphous structure; and
a second electrode disposed adjacent to the embedded resistor such that the embedded resistor is disposed between the resistive switching layer and the second electrode.
2. The stack of claim 1 , wherein the embedded resistor directly interfaces the resistive switching layer.
3. The stack of claim 1 , further comprising an intermediate electrode disposed between the embedded resistor and the resistive switching layer.
4. The stack of claim 1 , wherein the embedded resistor comprises one or more elements from columns 4 through 7 of the periodic table.
5. The stack of claim 1 , wherein the metal, silicon, and nitrogen of the embedded resistor form a silicon rich metal nitride material.
6. The stack of claim 1 , wherein a concentration of silicon in the embedded resistor is between about 5% atomic and 40% atomic.
7. The stack of claim 1 , wherein the metal of the embedded resistor comprises one of zirconium (Zr), vanadium (V), niobium (Nb), chromium (Cr), aluminum, (Al), hafnium (Hf), tantalum (Ta), titanium (Ti), tungsten (W), or molybdenum (Mo).
8. The stack of claim 1 , wherein the metal of the embedded resistor is hafnium.
9. The stack of claim 8 , wherein the embedded resistor further comprises aluminum.
10. The stack of claim 8 , wherein the embedded resistor further comprises tantalum.
11. The stack of claim 1 , wherein the metal is tantalum, and wherein a ratio of tantalum to silicon in the embedded resistor is between about 1:1 and 1:3.
12. The stack of claim 1 , wherein the metal is titanium, and wherein a ratio of titanium to silicon in the embedded resistor is between about 1:1 and 1:3.
13. The stack of claim 1 , wherein the embedded resistor has a thickness of between about 50 Angstroms and 500 Angstroms.
14. The stack of claim 1 , wherein the embedded resistor has a thickness of about 100 Angstroms.
15. The stack of claim 1 , wherein the embedded resistor is represented by a formula Ta x Si y N z where X=1, Y=2, and Z=3.
16. The stack of claim 15 , wherein the resistive switching layer comprises HfxOy.
17. The stack of claim 1 , wherein a resistivity of the embedded resistor is substantially constant over a voltage range from 4 MV/cm to 8 MV/cm.
18. The stack of claim 1 , wherein the resistive switching layer comprises one of HfxOy, TaxOy, AlxOy, LaxOy, YxOy, DyxOy, YbxOy, and ZrxOy.
19. The stack of claim 1 , wherein the resistive switching layer has a thickness of between 30 Angstroms and 50 Angstroms.
20. The stack of claim 1 , wherein at least one the first electrode or the second electrode comprises titanium nitride.