Charged particle beam apparatus
View Patent ↗Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film ( 10 ) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment ( 121 ) capable of holding the thin film ( 10 ) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber ( 7 ) of a high vacuum charged particle microscope. The attachment ( 121 ) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.
1. A charged particle beam apparatus comprising:
a charged particle optical column that scans a sample with a primary charged particle beam;
a detector that detects reflected electrons or secondary electrons obtained by the scanning;
a vacuum pump;
a first housing for forming a first space that is maintained in a vacuum state by the vacuum pump;
a second housing for forming a second space in which the sample is disposed; and
a thin film holding member that holds a thin film allowing the primary charged particle beam to penetrate therethrough, the thin film holding member being removably fixed so as to separate the first space and the second space, wherein
when the thin film holding member is fixed to the charged particle beam apparatus, a pressure in the second space can be maintained higher than a pressure in the first space by separating the first space and the second space with the thin film, and
when the thin film holding member is removed from the charged particle beam apparatus, the first space and the second space are communicated with each other, and the second space can be evacuated to a vacuum.
2. The charged particle beam apparatus according to claim 1 , wherein
the first housing supports the whole charged particle beam apparatus with respect to an apparatus installation plane, and
an interior of the first housing is evacuated to a vacuum by the vacuum pump.
3. The charged particle beam apparatus according to claim 1 , wherein
the thin film holding member is provided on an upper side face of the second housing.
4. The charged particle beam apparatus according to claim 1 , wherein
the second housing is cuboid in shape, one side face of which is open, and
the charged particle beam apparatus further comprises a covering member that covers the open face of the cuboid.
5. The charged particle beam apparatus according to claim 4 , wherein
the covering member is removably attached to the side face of the second housing.
6. The charged particle beam apparatus according to claim 1 , wherein
the second housing comprises:
a main body portion that is inserted into an interior of the first housing; and
a mating portion that is fixed to an outer wall face of the first housing, with a vacuum sealing member interposed therebetween.
7. The charged particle beam apparatus according to claim 1 , wherein
the first housing is attached to an upper outer wall of the second housing.
8. The charged particle beam apparatus according to claim 7 , further comprising a covering member that is removably attached to a side face of the second housing.
9. The charged particle beam apparatus according to claim 1 , wherein
the second housing has an open face that allows the sample disposed in an interior of the second housing to be replaced while an interior of the first housing is maintained in a vacuum state.
10. The charged particle beam apparatus according to claim 1 , wherein
the thin film holding member has a restriction member that restricts a distance between the sample and the thin film.
11. The charged particle beam apparatus according to claim 1 , further comprising an observation device configured to observe or measure a gap between the thin film and the sample.
12. A sample observation method using a charged particle beam apparatus, the charged particle beam apparatus comprising: a charged particle optical column that scans a sample with a primary charged particle beam; a detector that detects reflected electrons or secondary electrons obtained by the scanning; a vacuum pump; a thin film holding member that holds a thin film allowing the primary charged particle beam to penetrate therethrough; a first space that is maintained in a vacuum state by the vacuum pump; and a second space in which the sample is disposed, the method comprising:
in a state in which the thin film holding member is fixed to the charged particle beam apparatus so as to separate the first space and the second space, obtaining an image of the sample while a pressure in the second space is maintained higher than a pressure in the first space by separating the first space and the second space with the thin film; and
in a state in which the thin film holding member is removed from the charged particle beam apparatus, communicating the first space and the second space, evacuating the second space to a vacuum, and obtaining an image of the sample.
13. The sample observation method according to claim 12 , further comprising
covering one side face of the second space with a covering member.
14. The sample observation method according to claim 13 , wherein
the covering member is removably attached to the side face of the second housing for forming the second space.
15. The sample observation method according to claim 12 , further comprising
replacing the sample disposed in the second space while the first space is maintained in a vacuum state.
16. The sample observation method according to claim 12 , further comprising
restricting a distance between the sample and the thin film.
17. The sample observation method according to claim 12 , further comprising
observing or measuring a gap between the thin film and the sample.