Method and apparatus for producing disilane through pyrolysis of monosilane
An apparatus for producing disilane through pyrolysis of monosilane, includes: a monosilane pyrolysis unit; a solid particle removal unit which removes solid particles generated in the pyrolysis unit; a condensing unit which liquefies and collects unreacted monosilane, and disilane and higher silanes with three (3) to seven (7) silicon atoms as pyrolysis products excluding hydrogen from a gas with the solid particles removed; a first separation unit which separates monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes; and a second separation unit which separates disilane and higher silanes from the mixture with the monosilane removed. In accordance with the present disclosure, disilane can be produced economically and efficiently with high purity through pyrolysis of monosilane.
1. An apparatus for producing disilane through pyrolysis of monosilane, comprising:
a monosilane pyrolysis unit configured to pyrolyze monosilane and produce disilane and higher silanes, the pyrolysis unit having a pyrolysis temperature of 400-460° C., a pyrolysis pressure of 3-5 bar and a pyrolysis gas space velocity of 60-500 hr −1 ;
a solid particle removal unit configured to remove particles produced by the pyrolysis unit, the solid particle removal unit comprising a metal filter for removing particles exceeding 0.1 μm in diameter, and a ceramic support provided behind the metal filter for removing particles of 0.1 μm or smaller in diameter;
a condensing unit configured to condense and liquefy, after said removal of particles, unreacted monosilane, and disilane and higher silanes with three (3) to seven (7) silicon atoms produced as results of the pyrolysis by the pyrolysis unit, excluding hydrogen from a gas with the solid particles removed by said solid particle removal unit;
a first separation unit configured to separate monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes; and
a second separation unit configured to separate disilane from the resultant mixture containing disilane and higher silanes with three (3) to seven (7) silicon atoms.
2. The apparatus for producing disilane according to claim 1 , wherein the condensing is achieved by liquid nitrogen.
3. The apparatus for producing disilane according to claim 1 , wherein the separation is achieved based on boiling point.
4. The apparatus for producing disilane according to claim 1 , further comprising a heat exchange unit which controls temperature of a gas produced in the pyrolysis unit.
5. The apparatus for producing disilane according to claim 1 , further comprising a storage tank which stores disilane.
6. A method for producing disilane, comprising:
pyrolyzing monosilane at a pyrolysis temperature of 400-460° C., a pyrolysis pressure of 3-5 bar and a pyrolysis space velocity of 60-500 hr −1 ;
removing solid particles exceeding 0.1 μm in diameter from among solid particles in a gas generated during the pyrolysis using a metal filter and removing particles of 0.1 μm or smaller in diameter using a ceramic support;
liquefying and collecting unreacted monosilane, and disilane and higher silanes as pyrolysis products, said liquefying excluding hydrogen from the gas with the solid particles removed;
separating monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes with three (3) to seven (7) silicon atoms; and
separating disilane and higher silanes with three (3) to seven (7) silicon atoms from the mixture with the monosilane removed.
7. The method for producing disilane according to claim 6 , wherein the liquefying is achieved by liquid nitrogen.
8. The method for producing disilane according to claim 6 , wherein the separation is achieved based on boiling point.
9. The method for producing disilane according to claim 6 , further comprising controlling temperature of a gas produced after the pyrolysis of monosilane through heat exchange.