IP Library › Granted Patent US 9,536,032
Granted Patent B2
US 9,536,032 · App. 14/554,958 · Granted Jan 3, 2017

Method and system of layout placement based on multilayer gridlines

Inventors: Ting-Wei Chiang (New Taipei, TW); Li-Chun Tien (Tainan, TW); Hui-Zhong Zhuang (Kaohsiung, TW); Zhe-Wei Jiang (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G06F17/5072G06F17/5068H03K19/02H01L27/0207
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Quick Facts
Patent No.
US 9,536,032
App. No.
14/554,958
Granted
Jan 3, 2017
Kind
B2
Abstract

A method of forming a layout design for fabricating an integrated circuit is disclosed. The method includes identifying a line pattern of a first set of grid lines with respect to a second set of grid lines within a region of the layout design; and placing a k-th standard cell layout of the K standard cell layouts at the region of the layout design if the line pattern is determined to match a k-th predetermined line pattern of K predetermined line patterns. K is an integer equal to or greater than two, and k is an order index ranging from 1 to K. The region of the layout design is sized to fit one of K different standard cell layouts corresponding to a same standard cell functionality.

Claims (126)

1. A method of forming a layout design for fabricating an integrated circuit, the method comprising:

identifying a line pattern of a first set of grid lines with respect to a second set of grid lines within a region of the layout design, the region of the layout design being sized to fit one of K different standard cell layouts corresponding to a same standard cell functionality, K being an integer equal to or greater than two, the first set of grid lines extending along a first direction and corresponding to placement of a first set of layout patterns of a first layout layer of the layout design, the second set of grid lines extending along the first direction and corresponding to placement of a second set of layout patterns of a second layout layer of the layout design, the first set of grid lines having a first line pitch, and the second set of grid lines having a second line pitch different from the first line pitch,

wherein the line pattern includes a layout pattern aligned with a grid line of the first set of grid lines overlapping a layout pattern aligned with a grid line of the second set of grid lines; and

placing a k-th standard cell layout of the K standard cell layouts at the region of the layout design if the line pattern is determined to match a k-th predetermined line pattern of K predetermined line patterns, k being an order index ranging from 1 to K, and

at least one of the above operations being performed by a hardware processor.

2. The method of claim 1 , wherein

a ratio of the first line pitch to the second line pitch is M:N, M and N being positive integers;

two cell boundaries of the k-th standard cell layout overlap two corresponding grid lines of the first set of grid lines; and

K

=

L

M

,

L being a least common multiple of M and N.

3. The method of claim 1 , wherein the placing the k-th standard cell layout of the K standard cell layouts is performed in a manner such that two cell boundaries of the k-th standard cell layout overlap two corresponding grid lines of the first set of grid lines.

4. The method of claim 1 , wherein the first line pitch is greater than the second line pitch.

5. The method of claim 1 , wherein the K predetermined line patterns comprise:

a same placement for the first set of grid lines; and

K different placements for the second set of grid lines.

6. The method of claim 1 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a gate structure layer;

a first conductive layer over the gate structure layer; and

a second conductive layer over the first conductive layer.

7. The method of claim 1 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a fin structure layer for FinFETs;

a first conductive layer over the fin structure layer; and

a second conductive layer over the first conductive layer.

8. A method of forming a layout design for fabricating an integrated circuit, the method comprising:

identifying a line pattern of a first set of grid lines with respect to a second set of grid lines within a region of the layout design, the first set of grid lines extending along a first direction and corresponding to placement of a first set of layout patterns of a first layout layer of the layout design, the second set of grid lines extending along the first direction and corresponding to placement of a second set of layout patterns of a second layout layer of the layout design, the first set of grid lines having a first line pitch, and the second set of grid lines having a second line pitch different from the first line pitch; and

placing a plurality of standard cell layouts at the region of the layout design, the plurality of standard cell layouts having different cell widths measurable along a second direction or having different cell heights measurable along the second direction, wherein

a ratio of the first line pitch to the second line pitch is M:N, M and N being positive integers;

the cell widths or the cell heights of the plurality of standard cell layouts are integer multiples of R;

R

=

L

M

·

Pt

,

L being a least common multiple of M and N, and Pt being the first line pitch;

a standard cell layout of the plurality of standard cell layouts includes a layout pattern aligned with a grid line of the first set of grid lines overlapping a layout pattern aligned with a grid line of the second set of grid lines; and

at least one of the above operations is performed by a hardware processor.

9. The method of claim 8 , wherein the first pitch is greater than the second pitch.

10. The method of claim 8 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a gate structure layer;

a first conductive layer over the gate structure layer; and

a second conductive layer over the first conductive layer.

11. The method of claim 8 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a fin structure layer for FinFETs;

a first conductive layer over the fin structure layer; and

a second conductive layer over the first conductive layer.

12. A system of forming a layout design, comprising:

a non-transitory storage medium encoded with a set of instructions; and

a hardware processor communicatively coupled with the non-transitory storage medium and configured to execute the set of instruction, the set of instruction being configured to cause the processor to:

identify a line pattern of a first set of grid lines with respect to a second set of grid lines within a region of a layout design, the region of the layout design being sized to fit one of K different standard cell layouts corresponding to a same standard cell functionality, K being an integer equal to or greater than two, the first set of grid lines extending along a first direction and corresponding to placement of a first set of layout patterns of a first layout layer of the layout design, the second set of grid lines extending along the first direction and corresponding to placement of a second set of layout patterns of a second layout layer of the layout design, the first set of grid lines having a first line pitch, and the second set of grid lines having a second line pitch different from the first line pitch,

wherein the line pattern includes a layout pattern aligned with a grid line of the first set of grid lines overlapping a layout pattern aligned with a grid line of the second set of grid lines at a location other than a cell boundary; and

place a k-th standard cell layout of the K standard cell layouts at the region of the layout design if the line pattern is determined to match a k-th predetermined line pattern of K predetermined line patterns, k being an order index ranging from 1 to K.

13. The system of claim 12 , wherein

a ratio of the first line pitch to the second line pitch is M:N, M and N being positive integers;

two cell boundaries of the k-th standard cell layout overlap two corresponding grid lines of the first set of grid lines; and

K

=

L

M

,

L being a least common multiple of M and N.

14. The system of claim 12 , wherein the placing the k-th standard cell layout of the K standard cell layouts is performed in a manner such that two cell boundaries of the k-th standard cell layout overlap two corresponding grid lines of the first set of grid lines.

15. The system of claim 12 , wherein the K predetermined line patterns comprise:

a same placement for the first set of grid lines; and

K different placements for the second set of grid lines.

16. The system of claim 12 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a gate structure layer;

a first conductive layer over the gate structure layer; and

a second conductive layer over the first conductive layer.

17. The system of claim 12 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a fin structure layer for FinFETs;

a first conductive layer over the fin structure layer; and

a second conductive layer over the first conductive layer.

18. A system of forming a layout design, comprising:

a non-transitory storage medium encoded with a set of instructions; and

a hardware processor communicatively coupled with the non-transitory storage medium and configured to execute the set of instruction, the set of instruction being configured to cause the processor to:

identify a line pattern of a first set of grid lines with respect to a second set of grid lines within a region of the layout design, the first set of grid lines extending along a first direction and corresponding to placement of a first set of layout patterns of a first layout layer of the layout design, the second set of grid lines extending along the first direction and corresponding to placement of a second set of layout patterns of a second layout layer of the layout design, the first set of grid lines having a first line pitch, and the second set of grid lines having a second line pitch different from the first line pitch; and

place a plurality of standard cell layouts at the region of the layout design, the plurality of standard cell layouts having different cell widths measurable along a second direction or having different cell heights measurable along the second direction, wherein

a ratio of the first line pitch to the second line pitch is M:N, M and N being positive integers;

the cell widths or the cell heights of the plurality of standard cell layouts are integer multiples of R;

R

=

L

M

·

Pt

,

L multiple of M and N, and Pt being the first line pitch; and

a standard cell layout of the plurality of standard cell layouts includes a layout pattern aligned with a grid line of the first set of grid lines overlapping a layout pattern aligned with a grid line of the second set of grid lines at a location other than a boundary of the standard cell layout.

19. The system of claim 18 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a gate structure layer;

a first conductive layer over the gate structure layer; and

a second conductive layer over the first conductive layer.

20. The system of claim 18 , wherein

the first layout layer corresponds to fabricating a first component layer of the integrated circuit;

the second layout layer corresponds to fabricating a second component layer of the integrated circuit; and

the first component layer and the second component layer each correspond to a different one of the following component layers of the integrated circuit:

a fin structure layer for FinFETs;

a first conductive layer over the fin structure layer; and

a second conductive layer over the first conductive layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 3, 2014
From: CHIANG, TING-WEI; TIEN, LI-CHUN; ZHUANG, HUI-ZHONG; JIANG, ZHE-WEI
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 034360/0914 →
Continuity (1)
Related Publication 20160147926A1 · May 26, 2016