Forming a non-planar transistor having a quantum well channel
View Patent ↗In one embodiment, the present invention includes an apparatus having a substrate, a buried oxide layer formed on the substrate, a silicon on insulator (SOI) core formed on the buried oxide layer, a compressive strained quantum well (QW) layer wrapped around the SOI core, and a tensile strained silicon layer wrapped around the QW layer. Other embodiments are described and claimed.
1. An apparatus comprising:
a substrate;
a buried oxide layer formed directly on the substrate and between the substrate and a semiconductor fin;
the semiconductor fin comprising a silicon on insulator core formed directly on the buried oxide layer, the semiconductor fin providing a channel region for a non-planar field effect transistor (FET);
a first semiconductor layer comprising silicon germanium (SiGe) directly formed on and wrapped around the semiconductor fin, wherein the first semiconductor layer comprises a quantum well layer including a smaller bandgap than a bandgap of the semiconductor fin, the SiGe having a Ge concentration of at least approximately 10%;
a second semiconductor layer comprising tensile strained silicon directly wrapped around and on the first semiconductor layer; and a dielectric layer adjacent the second semiconductor layer;
wherein the first semiconductor layer provides a quantum well for holes; and wherein the second semiconductor layer provides a quantum well for electrons.
2. The apparatus of claim 1 , wherein the semiconductor fin comprises silicon.
3. The apparatus of claim 1 , further comprising a gate electrode adjacent the dielectric layer.
4. The apparatus of claim 3 , wherein the apparatus comprises a non-planar metal oxide semiconductor field effect transistor (MOSFET).
5. The apparatus of claim 1 , wherein the first semiconductor layer comprises a compressive strained quantum well layer.
6. The apparatus of claim 1 , wherein the apparatus comprises one of a high electron mobility transistor and a high hole mobility transistor.
7. An apparatus comprising:
a substrate;
a buried oxide layer directly formed on the substrate;
a semiconductor fin directly formed on the buried oxide layer, the semiconductor fin comprising a silicon on insulator core and providing a channel region for a non-planar field effect transistor (FET);
a first semiconductor layer comprising silicon germanium (SiGe) directly formed on and wrapped around the semiconductor fin, wherein the first semiconductor layer comprises a quantum well layer including a smaller bandgap than a bandgap of the semiconductor fin, the SiGe having a Ge concentration of at least approximately 10%;
a second semiconductor layer comprising tensile strained silicon directly wrapped around and on the first semiconductor layer, wherein the second semiconductor layer includes a smaller bandgap than the bandgap of the semiconductor fin and a larger bandgap than the bandgap of the first semiconductor layer; and
a dielectric layer adjacent the second semiconductor layer;
wherein the first semiconductor layer provides a quantum well for holes; and wherein the second semiconductor layer provides a quantum well for electrons.
8. The apparatus of claim 7 , wherein the first semiconductor layer is compressive strained.
9. The apparatus of claim 7 , wherein the semiconductor fin comprises silicon.
10. The apparatus of claim 7 , further comprising a gate electrode adjacent the dielectric layer.
11. The apparatus of claim 10 , further comprising a contact layer adjacent to the gate electrode.
12. The apparatus of claim 7 , wherein the semiconductor fin is strained.