IP Library › Granted Patent US 9,575,090
Granted Patent B2
US 9,575,090 · App. 14/563,826 · Granted Feb 21, 2017

Force measurement with real-time baseline determination

Inventors: Changchun Liu (Goleta, CA); Bede Pittenger (Santa Barbara, CA); Shuiqing Hu (Santa Barbara, CA); Chanmin Su (Ventura, CA)
Assignee: Bruker Nano, Inc.
G01Q30/06G01Q10/06
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Quick Facts
Patent No.
US 9,575,090
App. No.
14/563,826
Granted
Feb 21, 2017
Kind
B2
Abstract

An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.

Claims (24)

1. A method of detecting a force between a sample and a probe of an AFM, the method comprising:

positioning at least one of the probe and the sample at a location of interest of the sample;

moving at least one of the probe and the sample to lessen a separation therebetween and cause the two to interact;

measuring a deflection of the probe based on the moving step;

discriminating a deflection artifact from a deflection due to probe-sample interaction from the measured deflection data by continuously identifying a baseline during the moving step to derive an artifact free deflection and compare it with a predefined trigger force;

retracting the probe from the sample if the artifact free deflection substantially corresponds to the trigger force; and

determining the force between the sample and the probe, wherein the force is less than 20 pN.

2. The method of claim 1 , further comprising using the force as a trigger to change a parameter associated with the moving step.

3. The method of claim 2 , wherein the parameter is at least one of a speed, a direction and a force gradient.

4. The method of claim 1 , wherein the discriminating step includes comparing a drive ramp to a fit line based on data corresponding to the deflection, and further comprising extrapolating the baseline based on the comparison.

5. The method of claim 4 , wherein the fit line is determined by performing a least squares fit.

6. The method of claim 5 , further comprising repeating the comparing and extrapolating steps so as to provide a rolling baseline until a threshold trigger is met.

7. A method of detecting a force between a sample and a probe of an AFM, the method comprising:

positioning at least one of the probe and the sample at a location of interest of the sample;

moving at least one of the probe and the sample to lessen a separation therebetween and cause the two to interact;

measuring a deflection of the probe based on the moving step; and

using the measured deflection, in real time during the moving step, to determine an instantaneous baseline.

8. A method of detecting an observable interaction between a sample and a probe of an AFM, the method comprising:

positioning at least one of the probe and the sample at a location of interest of the sample;

moving at least one of the probe and the sample to lessen a separation therebetween and cause the two to interact;

measuring an observable interaction based on the moving step;

determining an observable interaction artifact from an observable interaction due to actual probe-sample interaction during the measuring step to derive an artifact free observable interaction and compare with a trigger;

retracting the probe from the sample if the artifact free observable interaction substantially corresponds to the trigger.

9. The method of claim 8 , wherein the observable interaction includes at least one of a group including: force, deflection, electric interaction (e.g., force, current, voltage), magnetic interaction, thermal interaction and electromagnetic interaction (e.g., scattering near field optical signals).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 5, 2015
From: LIU, CHANGCHUN; PITTENGER, BEDE; HU, SHUIQING; SU, CHANMIN
To: BRUKER NANO, INC.
Reel/Frame 034635/0360 →
Continuity (2)
Provisional Application 61913248 · Dec 7, 2013
Related Publication 20150160259A1 · Jun 11, 2015