IP Library Granted Patent US 9,605,759
Granted Patent B2
US 9,605,759 · App. 14/567,075 · Granted Mar 28, 2017

Metal seal for ultra high vacuum system

Inventors: Qingpo Xi (Beijing, CN); Tao Li (Beijing, CN); Feng Cao (Beijing, CA); Fumin He (Beijing, CA); Zhongwei Chen (San Jose, CA)
Assignee: HERMES MICROVISION INC.
F16J15/0881F16L23/20
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Quick Facts
Patent No.
US 9,605,759
App. No.
14/567,075
Granted
Mar 28, 2017
Kind
B2
Abstract

A metal gasket has a cross-sectional shape that is a six sided shape that resembles an irregular quadrangle that is substantially isosceles trapezoidal in shape with two sharp angles between the longest side and the second- and third-longest sides, respectively. The longest side of the cross section is the inner wall of the metal gasket.

Claims (10)

1. A metal gasket used for a vacuum seal, comprising:

an annular gasket made of metal with a cross section having six sides, consisting of:

an inner side, corresponding to an inner wall of the metal gasket;

a top side, extending from said inner side and being substantially perpendicular with the inner side;

a bottom side, extending from said inner side and being substantially perpendicular with the inner side;

an outer side, corresponding to an outer wall of the metal gasket and being parallel with the inner side;

an upper angled side, connecting said top side to said outer side; and

a lower angled side, connecting said bottom side to said outer side;

wherein the cross section has an acute angle between said longest side and said lower angled side between 30 degrees and 60 degrees, a thickness of said cross section from said inner side to said outer side is at least ten times the length of said top side, said thickness is five times the length of said outer side, and the length of said inner side is 2.2 times said thickness,

wherein when the metal gasket is used in sealing, at least one of the top side or bottom side deforms in a manner where a projection is formed which extends beyond said inner side away from said outer side.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2020
From: HERMES MICROVISION, INC.
To: HERMES MICROVISION INCORPORATED B.V.
Reel/Frame 054866/0742 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2020
From: HERMES MICROVISION INCORPORATED B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 054870/0156 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2014
From: XI, QINGPO; LI, TAO; CAO, FENG; HE, FUMIN; CHEN, ZHONGWEI
To: HERMES MICROVISION INC.
Reel/Frame 034479/0464 →
Continuity (2)
Division 13437107 · Apr 2, 2012
Related Publication 20150091258A1 · Apr 2, 2015