IP Library Granted Patent US 9,797,039
Granted Patent B2
US 9,797,039 · App. 14/569,129 · Granted Oct 24, 2017

Nozzle geometry for organic vapor jet printing

Inventors: Stephen R. Forrest (Ann Arbor, MI); Gregory McGraw (Ewing, NJ)
Assignee: The Regents of the University of Michigan
C23C14/12B41J2/005C23C14/04C23C14/228
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Quick Facts
Patent No.
US 9,797,039
App. No.
14/569,129
Granted
Oct 24, 2017
Kind
B2
Abstract

A first device is provided. The device includes a print head. The print head further includes a first nozzle hermetically sealed to a first source of gas. The first nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the first nozzle. At a distance from the aperture into the first nozzle that is 5 times the smallest dimension of the aperture of the first nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the first nozzle.

Claims (34)

1. A method, comprising:

providing a first device, the first device comprising:

a print head, further comprising a first nozzle hermetically sealed to a first source of gas and a second nozzle hermetically sealed to a second source of gas different from the first source of gas;

wherein the first nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the first nozzle;

wherein the second nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the second nozzle;

wherein, at a distance from the aperture into the first nozzle that is 5 times the smallest dimension of the aperture of the first nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the first nozzle;

wherein, at a distance from the aperture into the second nozzle that is 5 times the smallest dimension of the aperture into the second nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the second nozzle;

wherein the gas provided by the first source of gas includes a first organic material having a first sublimation temperature; and

wherein the gas provided by the second source of gas includes a second organic material having a second sublimation temperature at least 10 degrees Celsius different from the sublimation temperature of the first organic material;

maintaining different and independently controllable temperatures at the print head, the first source, of gas, and the second source of gas; and

ejecting a jet of gas from the first nozzle.

2. The method of claim 1 further comprising:

ejecting a jet of gas from the second nozzle.

3. The method of claim 1 , wherein the first device further comprises a third nozzle hermetically sealed to a third source of gas different from the first and second source of gas;

wherein the third nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the third nozzle;

wherein, at a distance from the aperture into the third nozzle that is 5 times the smallest dimension of the aperture into the third nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the third nozzle.

4. The method of claim 3 further comprising:

ejecting a jet of gas from the third nozzle.

5. The method of claim 1 further comprising:

mixing multiple organic sources to form the first gas source.

6. The method of claim 1 further comprising:

continuously varying a mixture of gasses to form the first gas source.

7. The method of claim 1 , wherein the first nozzle has a constant cross section from the aperture to a distance from the aperture into the first nozzle that is 2 times the smallest dimension of the aperture of the first nozzle.

8. The method of claim 1 , wherein the smallest dimension of the first nozzle in a direction perpendicular to a flow direction of the first nozzle continuously increases with distance from the aperture of the first nozzle for distances in the range of zero to 2 times the smallest dimension of the aperture of the first nozzle.

9. The method of claim 1 , wherein the smallest dimension of the first nozzle in a direction perpendicular to a flow direction of the first nozzle increases linearly with distance from the aperture of the first nozzle for distances in the range of zero to 2 times the smallest dimension of the aperture of the first nozzle.

10. The method of claim 1 , wherein the first nozzle is formed from a metal or a ceramic.

11. The method of claim 1 , wherein the first nozzle is formed of silicon.

12. The method of claim 1 , wherein the first nozzle has an aperture having a smallest dimension of 100 to 500 microns in a direction perpendicular to a flow direction of the first nozzle.

13. The method of claim 1 , wherein the first nozzle has an aperture having a smallest dimension of 20 to 100 microns in a direction perpendicular to a flow direction of the first nozzle.

14. The method of claim 1 , wherein the first nozzle has an aperture having a smallest dimension of 0.5 to 20 microns in a direction perpendicular to a flow direction of the first nozzle.

15. The method of claim 1 , wherein the cross section of the first nozzle perpendicular to the flow direction of the first nozzle is circular.

16. The method of claim 1 , wherein the cross section of the first nozzle perpendicular to the flow direction of the first nozzle is rectangular.

17. The method of claim 1 , wherein the aperture is formed in a protrusion from the print head.

18. A display manufactured according to the method of claim 1 .

Assignments (1)
CONFIRMATORY LICENSE Recorded Oct 6, 2020
From: UNIVERSITY OF MICHIGAN
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 053983/0710 →
Continuity (3)
Division 12729448 · Mar 23, 2010
Provisional Application 61211002 · Mar 25, 2009
Related Publication 20150140214A1 · May 21, 2015