IP Library › Granted Patent US 9,553,583
Granted Patent B2
US 9,553,583 · App. 14/570,553 · Granted Jan 24, 2017

Semiconductor device with a small off current and oxide semiconductor layer having a function of a channel formation layer

Inventors: Shunpei Yamazaki (Setagaya, JP); Jun Koyama (Sagamihara, JP); Masashi Tsubuku (Atsugi, JP); Kosei Noda (Atsugi, JP)
Assignee: Semiconductor Energy Laboratory Co., Ltd.
H03K19/00315G09G3/20G09G3/3291H01L27/1222H01L27/1225H01L29/7869H03K19/096G09G3/3233G09G2300/0439G09G2300/0842G09G2310/0275G09G2310/0286
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Quick Facts
Patent No.
US 9,553,583
App. No.
14/570,553
Granted
Jan 24, 2017
Kind
B2
Abstract

To reduce a leakage current of a transistor so that malfunction of a logic circuit can be suppressed, a semiconductor device includes a first conductive layer over an insulating layer, a semiconductor layer over the first conductive layer, a second conductive layer over the semiconductor layer, a gate insulating layer over the second conductive layer, and a gate electrode over the gate insulating layer. The semiconductor device may further include wiring layers. The logic circuit includes a transistor which includes an oxide semiconductor layer having a function of a channel formation layer and in which an off current is 1×10 −13 A or less per micrometer in channel width, and may be 1×10 −17 A or less per micrometer. A first signal, a second signal, and a third signal that is a clock signal are input as input signals. A fourth signal and a fifth signal whose voltage states are set in accordance with the first to third signals which have been input are output as output signals.

Claims (52)

1. A semiconductor device comprising:

a first conductive layer over an insulating layer;

a semiconductor layer over the first conductive layer;

a second conductive layer over the semiconductor layer;

a gate insulating layer over the second conductive layer; and

a gate electrode over the gate insulating layer.

2. The semiconductor device according to claim 1 , wherein the semiconductor layer is in contact with the gate insulating layer.

3. The semiconductor device according to claim 1 , further comprising a wiring layer over the gate insulating layer,

wherein the wiring layer is electrically connected to the semiconductor layer through the first conductive layer.

4. The semiconductor device according to claim 1 , wherein the semiconductor layer comprises an oxide semiconductor layer.

5. A display device comprising:

a driver circuit comprising the semiconductor device according to claim 1 ; and

a pixel portion including a pixel whose display state is controlled by the driver circuit.

6. An electronic device comprising:

the semiconductor device according to claim 1 ; and

an input unit, an LED lamp, or a speaker.

7. A semiconductor device comprising:

a first conductive layer over an insulating layer;

a semiconductor layer over the first conductive layer;

a second conductive layer over the semiconductor layer;

a first wiring layer in contact with a top surface of the semiconductor layer and the first conductive layer;

a gate insulating layer over the second conductive layer;

a gate electrode over the gate insulating layer; and

a second wiring layer in contact with the first wiring layer through a contact hole of the gate insulating layer.

8. The semiconductor device according to claim 7 , wherein the semiconductor layer is in contact with the gate insulating layer.

9. The semiconductor device according to claim 7 , further comprising a wiring layer over the gate insulating layer,

wherein the second wiring layer is electrically connected to the semiconductor layer through the first conductive layer.

10. The semiconductor device according to claim 7 , wherein the semiconductor layer comprises an oxide semiconductor layer.

11. A display device comprising:

a driver circuit comprising the semiconductor device according to claim 7 ; and

a pixel portion including a pixel whose display state is controlled by the driver circuit.

12. An electronic device comprising:

the semiconductor device according to claim 7 ; and

an input unit, an LED lamp, or a speaker.

13. A semiconductor device comprising:

a transistor comprising:

a first conductive layer over an insulating layer;

an oxide semiconductor layer including a channel formation layer over the first conductive layer;

a second conductive layer over the oxide semiconductor layer;

a gate insulating layer over the second conductive layer; and

a gate electrode over the gate insulating layer,

wherein an off current is 1×10 −17 A or per micrometer in channel width in the transistor.

14. The semiconductor device according to claim 13 , wherein the oxide semiconductor layer is in contact with the insulating layer.

15. The semiconductor device according to claim 13 , further comprising a wiring layer over the gate insulating layer,

wherein the wiring layer is electrically connected to the oxide semiconductor layer through the first conductive layer.

16. The semiconductor device according to claim 13 , wherein a carrier concentration of the oxide semiconductor layer is 1×10 14 /cm 3 or less in the transistor.

17. A display device comprising:

a driver circuit comprising the semiconductor device according to claim 13 ; and

a pixel portion including a pixel whose display state is controlled by the driver circuit.

18. An electronic device comprising:

the semiconductor device according to claim 13 ; and

an input unit, an LED lamp, or a speaker.

Priority Claims (1)
JP 2009-238918 · Oct 16, 2009 · national
Continuity (2)
Continuation 12902670 · Oct 12, 2010
Related Publication 20150097595A1 · Apr 9, 2015