Carbon film forming apparatus, carbon film forming method, and magnetic recording medium manufacturing method

1. A carbon film forming method that introduces a raw material gas including carbon into a film forming chamber, ionizes the gas by using an ion source, accelerates the ionized gas, and radiates the ionized gas to a surface of a substrate to form a carbon film on the surface of the substrate, comprising:

forming the carbon film while rotating a first magnet, which is provided on the opposite side of the substrate across a region in which the raw material gas is ionized so as to be eccentric and/or inclined with respect to a central axis connecting the center of the ion source and a position corresponding to the center of the substrate held by a holder, in a circumferential direction.

2. A magnetic recording medium manufacturing method comprising:

using the carbon film forming method according to claim 1 .

3. The carbon film forming method according to claim 1 ,

wherein the first magnet is disposed along the central axis.

4. The carbon film forming method according to claim 1 ,

wherein the first magnet is arranged only on the backside of the ion source.

5. The carbon film forming method according to claim 1 ,

wherein a second magnet, which is provided around a region in which the ionized gas is accelerated so as to be eccentric and/or inclined with respect to a central axis connecting the center of the ion source and a position corresponding to the center of the substrate held by the holder, is rotating while forming the carbon film.

6. A magnetic recording medium manufacturing method comprising:

using the carbon film forming method according to claim 5 .