Memory cells and methods of forming memory cells
View Patent ↗Some embodiments include a method of forming a memory cell. A first portion of a switching region is formed over a first electrode. A second portion of the switching region is formed over the first portion using atomic layer deposition. The second portion is a different composition than the first portion. An ion source region is formed over the switching region. A second electrode is formed over the ion source region. Some embodiments include a memory cell having a switching region between a pair of electrodes. The switching region is configured to be reversibly transitioned between a low resistive state and a high resistive state. The switching region includes two or more discrete portions, with one of the portions not having a non-oxygen component in common with any composition directly against it in the high resistive state.
1. A method of forming a memory cell, comprising:
atomic layer deposition of a first portion of a switching region over a first electrode to a thickness within a range of from greater than 0 angstroms to less than or equal to about 20 angstroms;
depositing a second portion of the switching region in contact with the first portion, the first and second portions being discreet portions, each of the first and second portions comprising one or more non-oxygen component, each non-oxygen component in each of the first and second portions differing from all non-oxygen components present in any material in direct physical contact with the respective portion;
forming an ion source region over the switching region; and
forming a second electrode over the ion source region.
2. The method of claim 1 wherein the atomic layer deposition deposits one or more transition metals.
3. The method of claim 1 wherein the atomic layer deposition forms a material comprising oxygen in combination with one or more transition metals.
4. The method of claim 1 wherein the atomic layer deposition forms a material comprising nitrogen in combination with one or more metals.
5. The method of claim 1 wherein the atomic layer deposition deposits one or more non-transition elements; wherein said non-transition elements are selected from the group consisting of metals, semi-metals, alkaline earth elements, and mixtures thereof.
6. The method of claim 1 wherein the atomic layer deposition forms a material comprising oxygen in combination with one or more non-transition elements; wherein said non-transition elements are selected from the group consisting of metals, semi-metals, alkaline earth elements, and mixtures thereof.
7. The method of claim 1 wherein the atomic layer deposition forms a material comprising oxygen in combination with one or more of aluminum, hafnium, silicon, titanium and zirconium.
8. The method of claim 1 wherein the ion source region comprises one or more of aluminum, copper, silver and tellurium.
9. The method of claim 1 wherein:
the first electrode comprises titanium nitride;
the atomic layer depositing forms an oxide over the titanium nitride of the first electrode; and wherein the forming the ion source region comprises:
forming a first material over the switching region; the first material comprising AlTeN, where the listed composition is described in terms of elemental constituents rather than in terms of a specific stoichiometry; and
forming a second material over the first material; the second material comprising CuZrAlTeO, where the listed composition is described in terms of elemental constituents rather than in terms of a specific stoichiometry.
10. The method of claim 1 wherein the atomic layer depositing forms only a portion of the switching region.