Type III-V and type IV semiconductor device formation
View Patent ↗Forming a semiconductor device is disclosed, according to embodiments of the present disclosure. Forming the semiconductor device can include forming a first semiconductor layer directly on a silicon substrate. Forming the semiconductor device can include forming a second semiconductor layer directly on the first semiconductor layer and forming an insulating trench in the second semiconductor layer. Forming the semiconductor device can include removing the second portion of the second semiconductor layer, and forming a third semiconductor layer directly on the first semiconductor layer and adjacent to the insulating trench such that the first portion of second semiconductor layer is electrically insulated from the third semiconductor layer. The first semiconductor layer and the third semiconductor layer can each be a type III-V semiconductor and the second semiconductor layer can be a type IV semiconductor.
1. A semiconductor device comprising:
a silicon substrate;
a first semiconductor layer directly on a full surface of the silicon substrate, the first semiconductor layer having a first region adjacent to an interface between the first semiconductor layer and the silicon substrate and a second region adjacent to the first region, the first region including a first concentration of defects and the second region including a second concentration of defects, wherein the second concentration of defects is less than the first concentration of defects;
a second semiconductor layer on the first semiconductor layer;
a third semiconductor layer directly on the first semiconductor layer; and
an insulating trench directly on the first semiconductor layer directly adjacent to the second semiconductor layer and the third semiconductor layer, such that the insulating trench electrically insulates the second semiconductor layer from the third semiconductor layer;
wherein the first semiconductor layer is a semi-insulating type III-V semiconductor, the third semiconductor layer is a type III-V semiconductor, and the second semiconductor layer is a type IV semiconductor.
2. The device of claim 1 , further comprising:
a first insulating layer positioned directly on first semiconductor layer;
wherein the second semiconductor layer is positioned directly on the first insulating layer, and wherein the insulating trench is positioned directly on the first semiconductor layer directly adjacent to the first insulating layer, such that the insulating trench electrically insulates the second semiconductor layer and the first insulating layer from the third semiconductor layer.
3. The device of claim 1 , wherein:
the second semiconductor layer is a first set of semiconductor fins each positioned on the first semiconductor layer; and
the third semiconductor layer is a second set of semiconductor fins each positioned directly on the first semiconductor layer.
4. The device of claim 3 further comprising:
a first insulating layer positioned directly on the first semiconductor layer;
wherein the first set of semiconductor fins are each positioned directly on the first insulating layer, and wherein the insulating trench is positioned directly on the first semiconductor layer directly adjacent to the first insulating layer, such that the insulating layer electrically insulates the second semiconductor layer and the first insulating layer from the third semiconductor layer.
5. The device of claim 1 , wherein
the first semiconductor layer is a thickness approximately within a range of 500 nanometers to 10 microns.