Pattern-forming method
A pattern-forming method includes providing a metal-containing film directly or indirectly on a substrate. A directed self-assembling film is provided directly or indirectly on the metal-containing film such that a plurality of phases of the directed self-assembling film is formed. At least a part of the plurality of phases of the directed self-assembling film is removed such that a pattern of the directed self-assembling film is formed. The metal-containing film and the substrate are sequentially etched using the pattern of the directed self-assembling film as a mask.
1. A pattern-forming method comprising:
applying a composition directly or indirectly on a substrate to provide a metal-containing film directly or indirectly on the substrate;
providing a directed self-assembling film directly or indirectly on the metal-containing film such that a plurality of phases of the directed self-assembling film is formed;
removing at least a part of the plurality of phases of the directed self-assembling film such that a pattern of the directed self-assembling film is formed;
sequentially etching the metal-containing film and the substrate using the pattern of the directed self-assembling film as a mask to obtain a patterned substrate; and
totally removing the directed self-assembling film and the metal-containing film from the substrate after the patterned substrate is obtained,
wherein the composition comprises:
a hydrolyzable compound which is a metal compound comprising a hydrolyzable group, a hydrolysis product of a metal compound comprising a hydrolyzable group, a hydrolytic condensation product of a metal compound comprising a hydrolyzable group, or a combination thereof; and
an organic solvent.
2. The pattern-forming method according to claim 1 , wherein a metal element of the metal compound is a group 3 element, a group 4 element, a group 5 element, a group 6 element, a group 12 element, a group 13 element, or a combination thereof.
3. The pattern-forming method according to claim 2 , wherein the metal element of the metal compound is titanium, zirconium or a combination thereof.
4. The pattern-forming method according to claim 1 , wherein the directed self-assembling film is provided using a composition for forming a directed self-assembling film which comprises:
a block copolymer, a mixture of two or more types of polymers that are not compatible with each other, or a combination thereof; and
an organic solvent.
5. The pattern-forming method according to claim 1 , further comprising:
providing an organic underlayer film on the substrate before providing the metal-containing film,
wherein the organic underlayer film is etched when the metal-containing film and the substrate is sequentially etched.
6. The pattern-forming method according to claim 1 , wherein the composition further comprises water.
7. The pattern-forming method according to claim 1 , wherein the composition further comprises a crosslinking accelerator.
8. The pattern-forming method according to claim 1 , wherein the hydrolyzable compound is a metal alkoxide, a metal carboxylate, or a metal complex.
9. The pattern-forming method according to claim 6 , wherein a content of the water is 0.1 parts by mass to 10 parts by mass with respect to 100 parts by mass of the composition.
10. The pattern-forming method according to claim 6 , wherein a content of the water is 1 part by mass to 8 parts by mass with respect to 100 parts by mass of the composition.
11. The pattern-forming method according to claim 7 , wherein the crosslinking accelerator is an onium salt compound, an N-sulfonyloxyimide compound or both thereof.
12. The pattern-forming method according to claim 7 , wherein the crosslinking accelerator is an onium salt compound.
13. The pattern-forming method according to claim 7 , wherein a content of the crosslinking accelerator is no less than 0.1 parts by mass and no greater than 5 parts by mass with respect to 100 parts by mass of the hydrolyzable compound.