IP Library Granted Patent US 9,418,814
Granted Patent B2
US 9,418,814 · App. 14/594,949 · Granted Aug 16, 2016

Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond

Inventors: Anirudha V. Sumant (Plainfield, IL); Sergey V. Baryshev (Lemont, IL); Sergey P. Antipov (Naperville, IL)
Assignee: UCHICAGO ARGONNE, LLC
H01J1/304H01J1/34H01J9/025H01J9/12H01J2201/30457H01J2201/3421
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,418,814
App. No.
14/594,949
Granted
Aug 16, 2016
Kind
B2
Abstract

A method of forming a field emitter comprises disposing a first layer on a substrate. The first layer is seeded with nanodiamond particles. The substrate with the first layer disposed thereon is maintained at a first temperature and a first pressure in a mixture of gases which includes nitrogen. The first layer is exposed to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, which has a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %. The field emitter has about 10 12 to about 10 14 emitting sites per cm 2 . A photocathode can also be formed similarly by forming a nitrogen doped ultrananocrystalline diamond film on a substrate similar to the field emitter, and then hydrogen terminating the film. The photocathode is responsive to near ultraviolet light as well as to visible light.

Claims (50)

1. A method of forming a field emitter, comprising:

disposing a first layer on a substrate;

seeding the first layer with nanodiamond particles;

maintaining the substrate with the seeded first layer disposed thereon at a first temperature and a first pressure in a mixture of gases, the mixture including nitrogen; and

exposing the first layer to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, the nitrogen doped ultrananocrystalline diamond film having a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %,

wherein, the field emitter has about 10 12 to about 10 14 emitting sites per cm 2 .

2. The method of claim 1 , wherein the first layer includes a transition metal.

3. The method of claim 2 , wherein the first layer includes at least one of molybdenum and niobium.

4. The method of claim 1 , wherein the first temperature is in the range of about 650 degrees Celsius to about 950 degrees Celsius.

5. The method of claim 1 , wherein the first pressure is in the range of about 40 Torr to about 70 Torr.

6. The method of claim 1 , wherein the substrate is at least one of planar, microstructured and nanostructured.

7. The method of claim 5 , wherein the substrate includes stainless steel.

8. The method of claim 5 , wherein the substrate is planar and wherein the nitrogen doped ultrananocrystalline diamond film has a current density in the range of about 0.1 mAmp/cm 2 to about at least 25 mAmp/cm 2 between an electric field gradient of about 45 MV/m to about 65 MV/m, respectively.

9. The method of claim 1 , wherein the nitrogen doped ultrananocrystalline diamond film has a beam emittance in the range of about 0.5 mm×mrad/mm-rms to about 3 mm×mrad/mm-rms at 65 MV/m.

10. The method of claim 1 , wherein the nitrogen doped ultrananocrystalline diamond film has a full width half maximum longitudinal energy spread of about 0.5% to about 1%.

11. A method of forming a photocathode, comprising:

disposing a first layer on a substrate;

seeding the first layer with nanodiamond particles;

maintaining the substrate with the seeded first layer disposed thereon at a first temperature and a first pressure in a mixture of gases, the mixture including nitrogen;

exposing the first layer to a microwave plasma to form a nitrogen doped ultrananocrystalline diamond film on the first layer, the nitrogen doped ultrananocrystalline diamond film having a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %;

maintaining the nitrogen doped ultrananocrystalline diamond film at a second temperature and second pressure in hydrogen gas; and

exposing the nitrogen doped ultrananocrystalline diamond film to a microwave plasma to hydrogen terminate the nitrogen doped ultrananocrystalline diamond film.

12. The method of claim 11 , wherein the first layer includes a transition metal.

13. The method of claim 11 , wherein the first temperature is in the range of about 650 degrees Celsius to about 950 degrees Celsius.

14. The method of claim 11 , wherein the first pressure is in the range of about 40 Torr to about 70 Torr.

15. The method of claim 11 , wherein the substrate is stainless steel.

16. The method of claim 11 , wherein the hydrogen terminated nitrogen doped ultrananocrystalline diamond film has a quantum efficiency of at least 5×10 −8 electrons/photons between a visible wavelength range of about 405 nm to about 436 nm, respectively.

17. The method of claim 11 , wherein the hydrogen terminated nitrogen doped ultrananocrystalline diamond film has a quantum efficiency of at least 10 −3 electrons/photons at wavelengths in the range of about 240 nm to about 270 nm.

18. The method of claim 11 , further comprising:

operating the photocathode until a performance of the photocathode is depleted; and

exposing the photocathode to an hydrogen plasma to restore the performance of the photocathode.

19. A field emitter, comprising:

a planar substrate;

a first layer disposed on the planar substrate; and

a nitrogen doped ultrananocrystalline diamond film disposed on the first layer, the nitrogen doped ultrananocrystalline diamond film having a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %,

wherein, the field emitter has about 10 12 to about 10 14 emitting sites per cm 2 .

20. The field emitter of claim 19 , wherein the nitrogen doped ultrananocrystalline diamond film has a current density in the range of about 0.3 mAmp/cm 2 to about 25 mAmp/cm 2 at an electric field gradient of about 45 MV/m to about 65 MV/m, respectively.

21. The field emitter of claim 19 , wherein the nitrogen doped ultrananocrystalline diamond film has a beam emittance in the range of about 0.5 mm×mrad/mm-rms to about 3 mm×mrad/mm-rms.

22. The field emitter of claim 19 , wherein the nitrogen doped ultrananocrystalline diamond film has a full width half maximum longitudinal energy spread of about 0.5% to about 1%.

23. The field emitter of claim 19 , wherein the field emitter is operable via a radio frequency energy source.

24. The field emitter of claim 19 , wherein the planar substrate is formed from stainless steel.

25. A photocathode, comprising:

a substrate;

a first layer disposed on the substrate; and

a hydrogen terminated nitrogen doped ultrananocrystalline diamond film disposed on the first layer, the hydrogen terminated nitrogen doped ultrananocrystalline diamond film having a percentage of nitrogen in the range of about 0.05 atom % to about 0.5 atom %,

wherein, the photocathode has about 10 12 to about 10 14 emitting sites per cm 2 .

26. The photocathode of claim 25 , wherein the hydrogen terminated nitrogen doped ultrananocrystalline diamond film has a quantum efficiency in the range of about 5×10 −8 electrons/photons to about 5×10 −9 electrons/photons between a visible wavelength range of about 405 nm to about 436 nm, respectively.

27. The photocathode of claim 26 , wherein the hydrogen terminated nitrogen doped ultrananocrystalline diamond film has a quantum efficiency of about 10 −3 electrons/photons at wavelengths in the range of about 240 nm to about 270 nm.

28. The photocathode of claim 26 , wherein the photocathode is operable at a pressure of up to about 10 −5 Torr.

29. The photocathode of claim 26 , wherein the nitrogen doped ultrananocrystalline diamond film is terminated with deuterium.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2016
From: BARYSHEV, SERGEY V; ANTIPOV, SERGEY P
To: EUCLID TECHLABS, LLC
Reel/Frame 039600/0437 →
CONFIRMATORY LICENSE Recorded Oct 7, 2015
From: UCHICAGO ARGONNE, LLC
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 036815/0302 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 16, 2015
From: SUMANT, ANIRUDHA V.
To: UCHICAGO ARGONNE, LLC
Reel/Frame 035429/0427 →
Continuity (1)
Related Publication 20160203937A1 · Jul 14, 2016