IP Library › Granted Patent US 9,580,809
Granted Patent B2
US 9,580,809 · App. 14/596,338 · Granted Feb 28, 2017

Article with gradient property and processes for selective etching

Inventor: Owen Hildreth (Pacific Grove, CA)
Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE
C23C18/1608C23C18/1879C23C18/31C25F3/12H01L21/28506H01L21/306H01Q17/00
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Quick Facts
Patent No.
US 9,580,809
App. No.
14/596,338
Granted
Feb 28, 2017
Kind
B2
Abstract

An article includes a substrate; and a coating disposed on the substrate that includes a microporous layer; a gradient in a density of a volume of the microporous layer, and a plurality of dendritic veins that are anisotropically disposed in the coating. A process for forming a coating includes disposing an activating catalyst on a substrate; introducing an activatable etchant; introducing an etchant oxidizer, performing an oxidation-reduction reaction between the substrate, the activatable etchant, and the etchant oxidizer in a presence of the activating catalyst, the oxidation-reduction reaction occurring in a liquid medium including the activatable etchant; and the etchant oxidizer, forming an etchant product comprising atoms from the substrate; removing a portion of the etchant product from the substrate; and forming a dendritic vein in the substrate to form the coating, the dendritic vein being anisotropically disposed in the coating.

Claims (27)

1. A process for forming a coating, the process comprising:

disposing an activating catalyst on a substrate;

introducing an activatable etchant;

introducing an etchant oxidizer;

performing an oxidation-reduction reaction between the substrate, the activatable etchant, and the etchant oxidizer in a presence of the activating catalyst, the oxidation-reduction reaction occurring in a liquid medium comprising:

the activatable etchant; and

the etchant oxidizer;

forming an etchant product comprising a plurality of atoms from the substrate;

removing a portion of the etchant product from the substrate; and

forming a dendritic vein in the substrate to form the coating, the dendritic vein being anisotropically disposed in the coating,

wherein the coating comprises a uniform gradient in an index of refraction of the coating that varies from 1 to 3.9.

2. The process of claim 1 , further comprising forming a gradient in a density of a volume of the coating.

3. The process of claim 2 , further comprising controlling a reflectivity of coating.

4. The process of claim 3 , wherein the coating has a reflectivity tuned from 10% to 0.01% at a wavelength from 30 nm to 10 cm.

5. The process of claim 2 , wherein a temperature of the substrate during the oxidation-reduction reaction is less than 150° C.

6. A process for forming a coating, the process comprising:

disposing an activating catalyst on a substrate;

introducing an activatable etchant;

subjecting the activating catalyst and the activatable etchant to an electric potential;

performing an electrochemical reaction between the substrate and the activatable etchant in a presence of the activating catalyst and the electric potential, the electrochemical reaction occurring in a liquid medium comprising:

the activatable etchant; and

an etchant oxidizer;

forming an etchant product comprising a plurality of atoms from the substrate;

removing a portion of the etchant product from the substrate; and

forming a plurality of dendritic veins in the substrate to form the coating, the plurality of dendritic veins being anisotropically disposed in the coating,

wherein the coating comprises a uniform gradient in an index of refraction of the coating that varies from 1 to 3.9.

7. The process of claim 6 , wherein a temperature of the substrate during the electrochemical reaction is less than 150° C.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 26, 2015
From: HILDRETH, OWEN
To: GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE, THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Reel/Frame 034807/0928 →
Continuity (2)
Provisional Application 61928090 · Jan 16, 2014
Related Publication 20150123249A1 · May 7, 2015